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Ultra-low-loss high-aspect-ratio Si_3N_4 waveguides
Open accessAbstract
We characterize an approach to make ultra-low-loss waveguides using stable and reproducible stoichiometric Si3N4 deposited with low-pressure chemical vapor deposition. Using a high-aspect-ratio core geometry, record low losses of 8-9 dB/m for a 0.5 mm bend radius down to 3 dB/m for a 2 mm bend radius are measured with ring resonator and optical frequency domain reflectometry techniques. From a waveguide loss model that agrees well with experimental results, we project that 0.1 dB/m total propagation loss is achievable at a 7 mm bend radius with this approach.
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“Also, SiN waveguides can have lower scattering losses from sidewall roughness in comparison to Si waveguides [27,28].”
From Integrated 1 × 3 MEMS silicon nitride photonics switch (2022) · cites this paper as [28]
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Cites
Analysis of curved optical waveguides by conformal transformation
Heiblum, M., & Harris, J. (1975) · IEEE Journal of Quantum Electronics · doi:10.1109/jqe.1975.1068563 · Cited by 741 · cited 1×
“To simulate bend radiation loss, the curved waveguide is transformed into an equivalent straight waveguide through a conformal mapping of the refractive index [19 ].”
MethodA theoretical analysis of scattering loss from planar optical waveguides
Payne, F. P., & Lacey, J. P. R. (1994) · Optical and Quantum Electronics · doi:10.1007/bf00708339 · Cited by 542
Optical Fiber Communications: Principles and Practice
Senior, J. M., & Kazovsky, L. G. (1987) · Physics Today · doi:10.1063/1.2820238 · Cited by 497 · cited 2×
“Propagation loss values for silicon oxynitride, silicon nitride, Ge-doped SiO 2 , P-doped SiO 2 , and polymer waveguide cores are shown as red squares in the figure with index contrasts ranging from 0.25 to 25% [1,6,7,11,22 – 32].”
BackgroundInfluentialEffect of size and roughness on light transmission in a Si/SiO2 waveguide: Experiments and model
Lee, K. C. Y., Lim, D. R. C. S., Luan, H.-C., Agarwal, A., Foresi, J. S., & Kimerling, L. C. (2000) · Applied Physics Letters · doi:10.1063/1.1308532 · Cited by 438
Vector Finite Difference Modesolver for Anisotropic Dielectric Waveguides
Fallahkhair, A. B., Li, K. S., & Murphy, T. E. (2008) · Journal of Lightwave Technology · doi:10.1109/jlt.2008.923643 · Cited by 402
Ay, F., & Aydınlı, A. (2004) · Optical Materials · doi:10.1016/j.optmat.2003.12.004 · Cited by 271
Barwicz, T., & Haus, H. A. (2005) · Journal of Lightwave Technology · doi:10.1109/jlt.2005.850816 · Cited by 237 · cited 10×
“…G is the dyadic Green’s function for one -layer media, 2 ( , ) shape F is the power array factor corresponding to the electric field shape at the sidewall as defined in [15], and 2 ( , ) pol S is the normalized power radiation profile of a point source with x, y, or z polarization, e.g.”
BackgroundMethodInfluentialPhotonic technologies for angular velocity sensing
Ciminelli, C., Dell’Olio, F., Campanella, C. E., & Armenise, M. N. (2010) · Advances in Optics and Photonics · doi:10.1364/aop.2.000370 · Cited by 211
Silica-based optical integrated circuits
Li, Y. P., & HENRY, C. H. (1996) · IEE Proceedings - Optoelectronics · doi:10.1049/ip-opt:19960840 · Cited by 160
Ultra-Low-Loss Polymer Waveguides
Yeniay, A., Gao, R., TAKAYAMA, K., Gao, R., & Garito, A. F. (2004) · Journal of Lightwave Technology · doi:10.1109/jlt.2003.822206 · Cited by 112
Research works printed but not linked: 1
- Ciminelli, 2009, J. Eur. Opt. Soc. Rapid Publ., 4, 1
Cited by
Sorted by citations
Items 301–400 of 492
1 × N All‐Logic Optical Switch Based on Polymer Platform Using Multimode Interferometer
Zeng, G., Zhang, D., Wang, F., Wang, X., & Yin, Y. (2024) · Advanced Photonics Research · doi:10.1002/adpr.202400118 · Cited by 4
Numerical investigation of silicon nitride trench waveguide
Zhao, Q., Huang, Y., Torun, R., Rahman, S. J., Atasever, T., & Boyraz, O. (2015) · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · doi:10.1117/12.2188378 · Cited by 4
Structural polarization conversion in integrated optical vertically stacked ring resonators
Ciminelli, C., Campanella, C. E., & Armenise, M. N. (2012) · Optics & Laser Technology · doi:10.1016/j.optlastec.2012.10.022 · Cited by 4
Reinventing the Circuit Board with Integrated Optical Interconnects
Michaels, A., & Yablonovitch, E. (2016) · Conference on Lasers and Electro-Optics · doi:10.1364/cleo_si.2016.stu4g.2 · Cited by 4
“1 dB/m [5]), making them ideal for the optical circuit board.”
BackgroundReal-time free spectral range measurement based on a correlated resonance-tracking technology
Feng, C., Wang, X., Bin, M., Gu, Z., & Li, J. (2023) · Optics Express · doi:10.1364/oe.500573 · Cited by 4
Zhang, R., Liu, F., Sundaram, V., & Tummala, R. (2017) · IEEE Electronic Components and Technology Conference (ECTC) · doi:10.1109/ectc.2017.306 · Cited by 4
“1 dB/cm) [3], but direct coupling from a single-mode fiber to a waveguide in silicon photonic chip have a high loss (~20 dB) due to the large-mode mismatch between the fiber core (~ 55 μm2) and the on-chip waveguide core (~ 0.”
BackgroundMode delocalization in disordered photonic Chern insulator
Chattopadhyay, U., Mittal, S., Hafezi, M., & Chong, Y. D. (2021) · Physical review. B./Physical review. B · doi:10.1103/physrevb.103.214201 · Cited by 4
A Silicon Nitride Microring Based High-Speed, Tuning-Efficient, Electro-Refractive Modulator
Karempudi, V. S. P., Thakkar, I. G., & Hastings, J. T. (2022) · IEEE International Symposium on Smart Electronic Systems (iSES) · doi:10.1109/ises54909.2022.00069 · Cited by 4
Erickson, T., & Lear, K. L. (2013) · IEEE Sensors Journal · doi:10.1109/jsen.2013.2242058 · Cited by 4
Optical Binary Switched Delay Line based on Low Loss Multimode Waveguide
Idres, S., & Hashemi, H. (2022) · Optical Fiber Communication Conference · doi:10.1364/ofc.2022.th1d.2 · Cited by 4
Dispersion engineering silicon nitride waveguides for broadband nonlinear frequency conversion
Epping, J. P. (2015) · doi:10.3990/1.9789036539395 · Cited by 4
Silicon Quantum Photonics ‐ Platform and Applications
Ekici, Ç., Semenova, E. S., Bacco, D., & Ding, Y. (2023) · Wiley eBooks · doi:10.1002/9783527837427.ch22 · Cited by 4
Numerical and Experimental Methods for Estimating the Propagation Loss in Microphotonic Waveguides
Dell’Olio, F., Hörmann, S. M., Natale, T., Baets, R., & Bergmann, A. (2025) · Advanced Photonics Research · doi:10.1002/adpr.202500103 · Cited by 3
Blue to near-IR integrated PZT silicon nitride modulators for quantum and atomic applications.
Montifiore, N., Isichenko, A., Chauhan, N., Wang, J.-W., Hunter, A. S., Harrington, M., Chawlani, R., Rudy, R. Q., Kierzewski, I. M., Pushkarsky, M., et al. (2026) · Optics Express · doi:10.1364/oe.588566 · Cited by 6
Self-citationKosolobov, S. S., Pshenichnyuk, I. A., Taziev, K. R., Zemtsova, A. K., Zemtsov, D. S., Smirnov, A. S., Zhigunov, D. M., & Drachev, V. P. (2024) · Uspekhi Fizicheskih Nauk · doi:10.3367/ufnr.2024.09.039762 · Cited by 3
Hong, S., Xie, Y., Tan, M., Li, Y., Ding, M., Zhang, L., Yu, Z., Wang, K., Ellis, A. D., & Daoxin Dai, A. (2025) · ACS Photonics · doi:10.1021/acsphotonics.4c02298 · Cited by 3
Zhou, W., Yao, R. R., & Lam, S. (2025) · IEEE Electron Devices Technology & Manufacturing Conference (EDTM) · doi:10.1109/edtm61175.2025.11041488 · Cited by 3
Silicon Optical Waveguides: State of the Art
Khan, I., Islam, A., & Mahmood, Z. H. (2013) · Cited by 3
Low-Loss Passive Si$_{3}$N $_{4}$ Serial-to-WDM Interface for Energy-Efficient Optical Interconnects
Hai, M. S., & Liboiron-Ladouceur, O. (2016) · Journal of Lightwave Technology · doi:10.1109/jlt.2016.2614945 · Cited by 3
“In this work, an integrated PWSM device is designed using low-loss Si3N4 waveguides [13].”
BackgroundMethodPassive chip-scale resonant optical gyroscope with sub-20-deg/hour/√Hz performance
Zawada, A. N., Jin, W., Abrams, N., Feshali, A., Paniccia, M. J., & Digonnet, M. J. F. (2024) · Optical and Quantum Sensing and Precision Metrology II · doi:10.1117/12.3012146 · Cited by 3
Zhu, Z., Zhong, Y., Lin, D. Y., Tong, X., Zhong, Q., & He, J. (2024) · Journal of Optics · doi:10.1088/2040-8986/ad4a89 · Cited by 3
Ultrahigh Q SOI ring resonator with a Hermite or B-spline curved waveguide
Tao, P., Yan, B., Bai, M., Zhou, M., Sun, C., Qi, Y., Wang, Y., Han, Z., Fan, Y., & Wang, Q. (2024) · Applied Optics · doi:10.1364/ao.531961 · Cited by 3
Hinum-Wagner, J. W., Scheibelhofer, P., Hörmann, S. M., Schmidt, C., Feigl, G., Kraft, J., & Bergmann, A. (2025) · Optical Materials Express · doi:10.1364/ome.564676 · Cited by 4
Porcel, M. A. G., Artundo, I., Doménech, D., Geuzebroek, D. H., Sunarto, R., & Hoofman, R. J. O. M. (2018) · Advanced Optical Technologies · doi:10.1515/aot-2017-0065 · Cited by 3
Chauhan, N., Bose, D., Puckett, M. W., Moreira, R. L., Nelson, K. D., & Blumenthal, D. J. (2019) · Conference on Lasers and Electro-Optics · doi:10.23919/cleo.2019.8750290 · Cited by 3
Self-citationMicro-opto-mechanical disk for inertia sensing
Dushaq, G. H., Muluget, T., & Rasras, M. (2016) · Photonic Sensors · doi:10.1007/s13320-015-0294-4 · Cited by 3
Megalini, L., Shenoy, R., Rose, K. H., Speck, J. S., Bowers, J. E., Nakamura, S., Cohen, D. A., & DenBaars, S. P. (2016) · physica status solidi (a) · doi:10.1002/pssa.201532540 · Cited by 3
Self-citationPassive dosimetry measurements on board the Skylab II mission.
Wailly, L. F., Schneider, M., Janni, J., Grimm, A. D., & Ainsworth, G. C. (1974) · PubMed · Cited by 3
Reinventing circuit boards with high density optical interconnects
Michaels, A., & Yablonovitch, E. (2016) · IEEE/LEOS Summer Topical Meetings · doi:10.1109/phosst.2016.7548724 · Cited by 3
“1 dB/m [5]), making them ideal for the optical circuit board.”
BackgroundKaźmierczak, A., Stopiński, S., Jusza, A., Anders, K., & Piramidowicz, R. (2017) · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · doi:10.1117/12.2271041 · Cited by 3
“On the contrary - SOI and Si3N4 technologies offer much denser integration of waveguide Proc. of SPIE Vol. 10325 103250A-2 structures, not allowing however integrating of active components.”
BackgroundInfluentialLow-loss D-shape Silicon Nitride Waveguides Using a Dielectric Lift-off Fabrication Process
Zhao, Q., Wang, J., Chauhan, N., Bose, D., Jin, N., Moreira, R. L., Behunin, R. O., Rakich, P. T., & Blumenthal, D. J. (2020) · Conference on Lasers and Electro-Optics · doi:10.1364/cleo_si.2020.sth1j.3 · Cited by 3
Self-citationChowdury, A., Eggleton, B. J., & Tan, D. T. H. (2025) · Nanophotonics · doi:10.1515/nanoph-2025-0073 · Cited by 3
Design and simulation of GaSe hybrid photonic waveguides on a β -Ga 2 O 3 platform
Islam, M. N., Ebon, M. I. R., Degtyarev, S. A., & Hossain, J. (2025) · Physica Scripta · doi:10.1088/1402-4896/ae1076 · Cited by 2
Rahman, T., Ebon, M. I. R., Sana, A. K., & Hossain, J. (2025) · Advanced Photonics Research · doi:10.1002/adpr.202500198 · Cited by 2
Zhang, B., Deng, K., Chu, W., Cai, H., & Chu, T. (2026) · Optics Communications · doi:10.1016/j.optcom.2026.133266 · Cited by 2
High-efficiency grating couplers for vertical coupling in thin-film silicon nitride technology
Croce, F. D., Vitali, V., Bucio, T. D., Pennoni, A., Liu, H., Cristiani, I., Gardes, F., Lacava, C., & Petropoulos, P. (2026) · Scientific Reports · doi:10.1038/s41598-026-44998-0 · Cited by 3
Hosseini, S., & Jamshidi, K. (2017) · Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC) · doi:10.1109/cleoe-eqec.2017.8087129 · Cited by 2
“Silicon nitride has been proposed and investigated recently as an appropriate material for integrated nonlinear signal processing applications due to its ultra-low loss and negligible two-photon absorption (TPA) at Telecom band [1-3].”
BackgroundMiniaturised photonic front-end for the next generation of space SAR applications
Mengual, T., Duarte, V. C., Polo, V., Piqueras, M. A., Sanchis, P., Brimont, A., Zurita, D., Chmielak, B., Suckow, S., Giesecke, A. L., et al. (2021) · International Conference on Space Optics (ICSO) · doi:10.1117/12.2599928 · Cited by 2
“This propagation loss is very low and similar to the record values achieved by [7].”
BackgroundResultYallew, H. D., Jágerská, J., & Greve, M. (2022) · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · doi:10.1116/6.0002187 · Cited by 2
Yan, H., Xie, Y., Zhang, L., & Daoxin Dai, A. (2022) · Asia Communications and Photonics Conference · doi:10.1109/acp55869.2022.10088653 · Cited by 2
“self-coupling coefficient, which equals to √1 − k2 [13].”
Parfenov, M. V., Agruzov, P. M., Tronev, A. V., Il'ichev, I. V., Usikova, A., Zadiranov, Y., & Shamrai, A. V. (2023) · Nanomaterials · doi:10.3390/nano13202755 · Cited by 2
Horikawa, T., Kitamura, A., Yatani, M., & Nishiyama, N. (2024) · IEEE Silicon Photonics Conference (SiPhotonics) · doi:10.1109/siphotonics60897.2024.10543392 · Cited by 2
Extraction of Reflection Coefficient in Silicon Waveguides using Multiple Reflection Signals in OFDR
Horikawa, T., Kitamura, A., Yatani, M., & Nishiyama, N. (2024) · doi:10.1364/cleo_at.2024.af1e.4 · Cited by 2
“Optical frequency domain reflectometry (OFDR) is used to extract the propagation loss [4,5], and reflection coefficients corresponding to backscatter [2,3].”
MethodJaturaphagorn, P., Chattham, N., Traiwattanapong, W., & Chaisakul, P. (2024) · Applied Sciences · doi:10.3390/app142210319 · Cited by 2
Enhancement of optical resonator Q-factor based on resonant optical field Re-Injection architecture
Li, Y., Zhao, L., & Ding, X. (2025) · Optics & Laser Technology · doi:10.1016/j.optlastec.2025.113175 · Cited by 2
Duan, Y.-Z., Xiao, K.-H., Fei, S.-X., Tao, R., Chen, Q., Liu, X., Hu, Z., Tian, Z., & Zhang, X. (2025) · Optics Express · doi:10.1364/oe.570038 · Cited by 2
Photonic front-end for the next-generation of space SAR applications
Piqueras, M. A., Mengual, T., Chmielak, B., Catalani, A., Huggard, P. G., Wang, H., & Ortuno, R. (2015) · European Microwave Integrated Circuits Conference · doi:10.1109/eumic.2015.7345129 · Cited by 2
Wang, Y., Wang, J., Sun, C., Xiong, B., Luo, Y., Hao, Z., Han, Y., Wang, L., & Li, H. (2015) · Opto-Electronics and Communications Conference (OECC) · doi:10.1109/oecc.2015.7340155 · Cited by 2
All-optical signal processing using silicon devices
Oxenløwe, L. K., Pu, M., Ding, Y., Hu, H., Ros, F. D., Vukovic, D., Jensen, A. S., Ji, H., Galili, M., Peucheret, C., et al. (2014) · European Conference on Optical Communication · doi:10.1109/ecoc.2014.6964241 · Cited by 2
Waveguide Integrated Superconducting Nanowire Single Photon Detectors on Silicon
Pernice, W. H. P., Schuck, C., & Tang, H. X. (2016) · Quantum science and technology · doi:10.1007/978-3-319-24091-6_4 · Cited by 2
Ultra-low loss stitching for large-area waveguide based delay-line gyroscopes
Huffman, T., Davenport, M. L., Belt, M. E., Bowers, J. E., & Blumenthal, D. J. (2016) · IEEE Photonics Conference · doi:10.1109/ipcon.2016.7831188 · Cited by 2
“To measure the propagation loss of the coil we use the optical backscatter technique detailed in [3].”
BackgroundMethodInfluentialSelf-citationIntegrated-optics based multi-beam imaging for speed improvement of OCT systems
Akca, B. I., Weiss, N. M., Coumans, F. A. W., & van Leeuwen, T. G. J. M. (2017) · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · doi:10.1117/12.2248721 · Cited by 2
“1 Materials system The design was made in TriPleX technology platform [10].”
MethodPhotoinduced χ(2) for second harmonic generation in stoichiometric silicon nitride waveguides
Porcel, M. A. G., Mak, J., Taballione, C., Schermerhorn, V. K., Epping, J. P., van der Slot, P. J. M., & Boller, K. J. (2017) · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · doi:10.1117/12.2265797 · Cited by 2
“This SH wave will produce a DC electric field EDC via the third-order susceptibility, χ((3)) according to(22,24) EDC ∝ χ((3))|E(ω)|(2)E(2ω)cos(∆kz), (1)”
BackgroundPhotonic Integration Beyond Silicon
Blumenthal, D. J. (2018) · International Topical Meeting on Microwave Photonics · doi:10.1109/mwp.2018.8552887 · Cited by 2
Self-citationDesign and characterization of metamaterial-based dual band absorber for infrared applications
Jaradat, H. M., Ait-El-Aoud, Y., & Akyurtlu, A. (2016) · Journal of Optics · doi:10.1007/s12596-016-0366-x · Cited by 2
“This material is specifically chosen because of the lower index which makes the resulting device more tolerant to fabrication imperfections [22].”
Guo, Y., Guo, Y., Jafari, Z., Xu, L., & Zhang, L. (2021) · Optics & Laser Technology · doi:10.1016/j.optlastec.2021.107692 · Cited by 2
Integrated Brillouin lasers and their applications
Blumenthal, D. J., Kabakova, I. V., Rakich, P. T., & Vahala, K. J. (2022) · Semiconductors and semimetals · doi:10.1016/bs.semsem.2022.05.004 · Cited by 2
Self-citationHigh-Q silicon nitride resonator gyroscope interrogated with broadband light
Zawada, A. N., Feshali, A., Jin, W., Abrams, N., Paniccia, M. J., & Digonnet, M. J. F. (2023) · Optical and Quantum Sensing and Precision Metrology II · doi:10.1117/12.2657332 · Cited by 2
Photonic front-end for the next-generation of space SAR applications
Piqueras, M. A., Mengual, T., Chmielak, B., Catalani, A., Huggard, P. G., Wang, H., & Ortuno, R. (2015) · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · doi:10.1117/12.2194966 · Cited by 2
“This propagation loss is very low and similar to the record values achieved by [7].”
BackgroundResultWeak One-Dimensional Field Confinement Silica Waveguides
Zhao, C., Chen, L., Xu, L., & Liu, L. (2020) · IEEE photonics journal · doi:10.1109/jphot.2020.3007721 · Cited by 2
“a distinction between TE and TM polarizations as expected in a regular waveguide [10].”
BackgroundIndependently Coupled and PZT Controllable Photonic Integrated Three-Resonator Photonic Molecule
Wang, J., Liu, K., Zhao, Q., Isichenko, A., Rudy, R. Q., & Blumenthal, D. J. (2021) · Conference on Lasers and Electro-Optics · doi:10.1364/cleo_si.2021.stu1f.7 · Cited by 2
Self-citationBhandari, B., Im, C.-S., Oh, M., & Lee, S. (2021) · Opto-Electronics and Communications Conference (OECC) · doi:10.1364/oecc.2021.w2c.2 · Cited by 2
John, D. D., Bauters, J. F., Nedy, J., Li, W., Moreira, R. L., Barton, J. S., Bowers, J. E., & Blumenthal, D. J. (2011) · Optical Fiber Communication Conference · doi:10.1364/ofc.2011.ows3 · Cited by 2
Self-citationHigh-power, highly-efficient thulium-doped potassium double tungstate channel waveguide lasers
van Dalfsen, K. (2017) · doi:10.3990/1.9789462335660 · Cited by 2
“The strong intensities and confinement in channel waveguides can even be exploited for the realisation of on-chip super-continuum light sources, realised on extremely low-loss Si3N4 (TriPleX) [23, 24].”
BackgroundThongyim, I., Jaturaphagorn, P., Srikam, S., & Chaisakul, P. (2023) · Results in Optics · doi:10.1016/j.rio.2023.100591 · Cited by 1
Perspective Chapter: Optical Waveguides for Quantum Computation
Raad, S. H. (2024) · IntechOpen eBooks · doi:10.5772/intechopen.114996 · Cited by 1
Low-loss photonic junction design for multi-die PICs
Ramanujam, Y., & Liang, D. (2025) · Smart Photonic and Optoelectronic Integrated Circuits · doi:10.1117/12.3040710 · Cited by 1
“Furthermore, the development of low-loss platforms based on CMOS compatible materials such as Si 3 N ,7 has enabled the use of weak nonlinear properties at scale.”
Modulation-free laser stabilization with aided acquisition for extended locking range
Idjadi, M. H., Ashtiani, F., & Kim, K. (2025) · Optics Express · doi:10.1364/oe.558969 · Cited by 1
High-Q aluminum oxide microring resonators operating at 460 nm
Kervazo, R., Perin, G., Bodiou, L., Trebaol, S., & Charrier, J. (2025) · Optics Express · doi:10.1364/oe.573449 · Cited by 1
Sankhyan, S. B., & Charhate, S. (2025) · Journal of Sensor Science and Technology · doi:10.46670/jsst.2025.34.5.532 · Cited by 1
High Alignment/Fabrication Tolerance Compact Multistage Trident-Type Silicon Nitride Edge Coupler
Wang, Y., Wang, Y., Zhang, Z., Zhang, K., Yang, G., & Wang, C. (2025) · IEEE Photonics Technology Letters · doi:10.1109/lpt.2025.3623234 · Cited by 1
Single-Particle Photothermal Microscopy Using On-Chip Silicon Nitride Microring Resonators
Podorova, Y., Vollbrecht, C. H., Evans, S. J., Rarick, H., Manna, A., Majumdar, A., & Goldsmith, R. H. (2025) · The Journal of Physical Chemistry A · doi:10.1021/acs.jpca.5c06077 · Cited by 1
Performance Simulation and Optimal Design for Silicon–Nitride Arrayed Waveguide Grating
Yu, Z., Sun, D., Bi, M., Sun, Y. J., & Guo, S. (2026) · Coatings · doi:10.3390/coatings16010063 · Cited by 1
Air-gap-coupled MEMS-tunable Littrow SiN wavelength-division multiplexer
Kharazmi, M., Pottier, P., Ozhikandathil, J., & Packirisamy, M. (2026) · Journal of the Optical Society of America B · doi:10.1364/josab.580808 · Cited by 1
Ultra-compact and high performance three-way optical power splitter
İrem, Ö., & Oner, B. B. (2026) · Optical and Quantum Electronics · doi:10.1007/s11082-026-08780-w · Cited by 1
Zeng, H., Hu, Q., Zhang, Y., Liu, X., Zhuang, Y., Wang, Z., Wei, X., & Xu, Z. (2026) · Nanomaterials · doi:10.3390/nano16090559 · Cited by 1
Modeling integrated frequency shifters and beam splitters
Muñoz-Arias, M. H., Randles, K., Otterstrom, N. T., Davids, P. S., Gehl, M. R., & Sarovar, M. (2026) · Physical Review Applied · doi:10.1103/7jm4-641d · Cited by 3
“This new application area for integrated photonics has motivated impressive progress in the field, including the fabrication of ultra low loss waveguides and interconnects [4–6], novel electro-optic components [7, 8], and new fabrication processes and tools [9].”
Li, J., Han, Y., Chen, A., LI, P., Zhu, X., Guanbao, Z., Peng, L., & Zheng, H. (2026) · Nanophotonics · doi:10.1002/nap2.70182 · Cited by 1
Wang, Y., Luo, Y., Xiong, B., Sun, C., Wang, J., Hao, Z., Han, Y., Wang, L., & Li, H. (2016) · Journal of Modern Optics · doi:10.1080/09500340.2016.1226440 · Cited by 1
“For SiNx/SiO2 waveguides fabricated on silicon substrate, a thick lower cladding of several microns is considered necessary to reduce the substrate leakage loss [3].”
Ultra-broadband High Coupling Efficiency Using a Si3N4/SiO2 waveguide on silicon
Zhu, T., Veilleux, S., Bland‐Hawthorn, J., & Dagenais, M. (2016) · IEEE/LEOS Summer Topical Meetings · doi:10.1109/phosst.2016.7548744 · Cited by 1
“1 μm, transparent dielectric waveguides on silicon have the advantage of a large transparency window and an ultra-low propagation loss [2].”
BackgroundHosseini, R., & Jamshidi, K. (2018) · Optics Communications · doi:10.1016/j.optcom.2018.03.048 · Cited by 1
Wilmart, Q., Sciancalepore, C., Fowler, D., Dirani, H. E., Hassan, K., Garcia, S., Malhouitre, S., & Olivier, S. (2018) · IEEE CPMT Symposium Japan (ICSJ) · doi:10.1109/icsj.2018.8602665 · Cited by 1
Design and Simulation of a Si3N4 Sub-GHz Resolution Integrated Micro-Spectrometer
Ghorbani, H., Tewari, R., Rad, M., Bernier, É., & Hall, T. J. (2019) · International Conference on Numerical Simulation of Optoelectronic Devices (NUSOD) · doi:10.1109/nusod.2019.8806837 · Cited by 1
“Thin core SS waveguides have been designed and their bend losses for different radii and thicknesses have been calculated in [4, 5].”
Helin, P., Firrincieli, A., Chaudhuri, A. R., Pham, N., Lenci, S., Mannarino, M., & Osman, H. (2019) · OptoElectronics and Communications Conference and International Conference on Photonics in Switching and Computing (OECC/PSC) · doi:10.23919/ps.2019.8818059 · Cited by 1
“03dB/cm for a thickness of 80nm at 1550nm [1].”
BackgroundMilliwatt Threshold Ultra-Low Linewidth Photonic Integrated Si3N4 Brillouin Laser
Liu, K., Puckett, M. W., Harrington, M., Brodnik, G. M., Zhao, Q., Chauhan, N., Wang, J., Behunin, R. O., Nelson, K. D., & Blumenthal, D. J. (2021) · Conference on Lasers and Electro-Optics · doi:10.1364/cleo_si.2021.sf2o.1 · Cited by 1
Self-citationPhotonic Front-End for the next-generation of space SAR applications
Piqueras, M. A., Mengual, T., Chmielak, B., Catalani, A., Huggard, P. G., Wang, H., & Ortuno, R. (2015) · European Microwave Conference (EuMC) · doi:10.1109/eumc.2015.7345972 · Cited by 1
Compact multimode silicon-nitride waveguide micro-ring resonator with high-Q
Cui, S., Cao, K., Pan, Z., Gao, X., Yu, Y., & Zhang, X. (2023) · Opto-Electronics and Communications Conference (OECC) · doi:10.1109/oecc56963.2023.10209584 · Cited by 1
“The silicon nitride (Si3N4) is an excellent photonic platform due to its wide transparency range, high refractive index, compatibility with large-scale semiconductor manufacturing, and ultra-low loss [1].”
BackgroundPatsamanis, G., Ketzaki, D. A., Chatzitheocharis, D., & Vyrsokinos, K. (2024) · Photonics · doi:10.3390/photonics11040381 · Cited by 2
A 6 mm2 Wideband Modulation-free Laser Stabilization Chip in a Commercial SiN Process
Idjadi, M. H., Ashtiani, F., & Kim, K. (2024) · doi:10.1364/cleo_si.2024.sth3c.4 · Cited by 1
Low-loss and Thermorefractive-stable Tantalum Pentoxide Integrated Photonics
Liu, Z., Yu, X., & Zhao, Q. (2024) · Optoelectronics Global Conference · doi:10.1109/ogc62429.2024.10738749 · Cited by 1
Performance analysis of polarization transformation waveguide structures for planar light circuits
Samadian, P., & Hall, T. J. (2016) · Optical and Quantum Electronics · doi:10.1007/s11082-015-0339-3 · Cited by 1
Silicon nitride on-silicon 3-dimensional photonic circuits for integrated photodetection
Buzbee, M., Lombardo, D., Zhan, Q., Hendrickson, J. R., Sarangan, A. M., & Agha, I. H. (2016) · OSA Advanced Photonics Congress · doi:10.1364/iprsn.2016.itu1a.3 · Cited by 1
Bru, L. A., Micó, G., Pastor, D., Pérez, D., Doménech, D., Sánchez, A., Cirera, J. M., Sánchez, J., Domı́nguez, C., & Muñoz, P. (2017) · OSA Advanced Photonics Congress · doi:10.1364/iprsn.2017.iw2a.6 · Cited by 1
Nanoscale C‐Rich SixC1−x Bus/Ring Waveguide Based Cross‐Wavelength Data Converter
Syu, S., Cheng, C., Wang, H., Chi, Y., & Lin, G. (2019) · Annalen der Physik · doi:10.1002/andp.201800414 · Cited by 1
Chen, H., Zhou, J., Fu, H., Huang, X., & Zhao, Y. (2019) · Conference on Lasers and Electro-Optics · doi:10.23919/cleo.2019.8749725 · Cited by 1
Chen, H., Zhou, J., Fu, H., & Zhao, Y. (2021) · Semiconductors and semimetals · doi:10.1016/bs.semsem.2021.04.007 · Cited by 1
Single-polarization silicon nitride waveguide ring resonator
Feng, C., Li, H., Gao, S., Qing, C., & Feng, L. (2021) · Applied Optics and Photonics China (AOPC): Optoelectronics and Nanophotonics · doi:10.1117/12.2601262 · Cited by 1
“first proposed the approach to make ultra-low-loss waveguides using the stoichiometric Si3N4 deposited with low-pressure chemical vapor deposition (LPCVD) as report in [12].”
MethodThe road ahead for integrated photonics (tutorial)
Heck, M. J. R. (2022) · IEEE Photonics Conference · doi:10.1109/ipc53466.2022.9975475 · Cited by 1
Self-citationZhang, Z., & Keil, N. (2015) · doi:10.1002/9781118867204.ch9 · Cited by 1
Lithium Niobate Nonlinear Nanophotonics
Wang, C. (2017) · Digital Access to Scholarship at Harvard (DASH) (Harvard University) · Cited by 1
Metadata
- Authors
- Bauters, J. F., Heck, M. J. R., John, D., Dai, D., Tien, M.-C., Barton, J. S., Leinse, A., Heideman, R. G., Blumenthal, D. J., & Bowers, J. E.
- Affiliations
- University of California, Santa Barbara (US)
- Venue
- Optics Express
- Publisher
- Optica Publishing Group
- Published
- 2011-02-03
- Volume
- 19
- Issue
- 4
- Pages
- 3163
- ISSN
- 1094-4087 (ISSN-L)
- OpenAlex
- W2169561975
- Cited by
- 492
- References
- 28
- Citations by year
- 2026: 33 · 2025: 48 · 2024: 37 · 2023: 22 · 2022: 38 · 2021: 38 · 2020: 39 · 2019: 30 · 2018: 35 · 2017: 47 · 2016: 33 · 2015: 25 · 2014: 17 · 2013: 22 · 2012: 14
- FWCI
- 14.56
- Type
- journal article
- Language
- en
- Open access
- gold
- doi.org
- Locations
- Optics Express (publishedVersion)
- PubMed (publishedVersion)
- Funders
- Defense Advanced Research Projects Agency
- Topics
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Photonic and Optical Devices
- Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Photorefractive and Nonlinear Optics
- Physical Sciences › Physics and Astronomy › Condensed Matter Physics › GaN-based semiconductor devices and materials
- Keywords
- silicon nitride waveguides, low-loss waveguides, low-pressure chemical vapor deposition, bending loss, ring resonator, optical frequency domain reflectometry, integrated photonics
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