Dielectric constant measurement of thin films by differential time-domain spectroscopy
Abstract
We present a theoretical model and preliminary experimental results on the dielectric constant measurement of thin films by using differential time-domain spectroscopy. This technique greatly reduces the minimum measurable thickness, and it promises the dielectric constant measurement of μm-thick thin films with the frequency range from GHz to THz.
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Several methods have been reported to lower the detection threshold for terahertz thin-film sensing, such as difference signals, metamaterial resonance shifts, and metal meshes.
“Various techniques have been reported to improve the detection threshold for THz thin film sensing, e. g., evaluation of difference signals, 3 resonance changes of metamaterials, 4 or the application of metal meshes to enhance the amplitude reduction of the THz bandpass.5”
From Highly sensitive terahertz measurement of layer thickness using a two-cylinder waveguide sensor (2010) · cites this paper as [3]
Double-modulation terahertz spectroscopy rapidly translates the sample into and out of the THz beam, resulting in a differential signal sensitive to subtle variations in absorption and phase.
“Double-modulation terahertz spectroscopy achieves this by rapidly translating the sample into and out of the THz beam,6,7 resulting in a differential signal sensitive to subtle variations in absorption and phase.”
From Dual-Beam THz Spectrometer with Low-Aberration Optics and Off-Axis Multipixel Photoconductive Emitters for Reduced Systematic Errors (2025) · cites this paper as [6]
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Amirkhan, F., Robichaud, A., Ropagnol, X., Gratuze, M., Ozaki, T., Nabki, F., & Blanchard, F. (2020) · Optics Letters · doi:10.1364/ol.393917 · Cited by 6 · see citing works
Measurement of THz Spot Sizes with a λ/200 Diameter in the Near-Field of a Metal Tip
van der Valk, N. C. J., & Planken, P. C. M. (2003) · Journal of Biological Physics · doi:10.1023/a:1024405128507 · Cited by 6 · see citing works
Perspectives on THz Time Domain Spectroscopy
Cheville, A. (2004) · Journal of the Optical Society of Korea · doi:10.3807/josk.2004.8.1.034 · Cited by 6 · see citing works
Signal Estimation and Uncertainties Extraction in Terahertz Time-Domain Spectroscopy
Denakpo, E., Hannotte, T., Osseiran, N., Orieux, F., & Peretti, R. (2025) · IEEE Transactions on Instrumentation and Measurement · doi:10.1109/tim.2025.3554287 · Cited by 6 · see citing works
“Historically [14], [15], [16], [17], the sequence of information extraction included a fast Fourier transform (FFT), phase unwrap, refractive index evaluation thanks to a basic and often valid photonic model, and finally, the parameter estimation.”
Relative contribution of geometric shape and periodicity to resonant terahertz transmission
Lee, J. W., & Kim, D. S. (2010) · Journal of Applied Physics · doi:10.1063/1.3445780 · Cited by 5 · see citing works
Yoo, H. K., Kang, C., Kee, C., Hwang, I., & Lee, J. W. (2016) · AIP Advances · doi:10.1063/1.4967781 · Cited by 5 · see citing works
Monopole resonators in planar plasmonic metamaterials
Lee, J. W., Yang, J., Sohn, I., Yoo, H. K., Kang, C., & Kee, C. (2014) · Optics Express · doi:10.1364/oe.22.018433 · Cited by 5 · see citing works
Folded slot resonator array with efficient terahertz transmission
Lee, J. W., Yang, J., Sohn, I., Kang, C., & Kee, C. (2012) · Optics Communications · doi:10.1016/j.optcom.2012.11.099 · Cited by 5 · see citing works
Optical isotropy at terahertz frequencies using anisotropic metamaterials
Lee, I.-S., Sohn, I., Kang, C., Kee, C., Yang, J., & Lee, J. W. (2016) · Applied Physics Letters · doi:10.1063/1.4959032 · Cited by 5 · see citing works
Terahertz modulation using TIPS-pentacene thin films deposited on patterned silicon substrates
Park, J. M., Sohn, I., Kang, C., Kee, C., Hwang, I., Yoo, H. K., & Lee, J. W. (2015) · Optics Communications · doi:10.1016/j.optcom.2015.10.008 · Cited by 5 · see citing works
- Authors
- Jiang, Z., Li, M., & Zhang, X.-C.
- Affiliations
- Rensselaer Polytechnic Institute (US)
- Venue
- Applied Physics Letters
- Publisher
- AIP Publishing
- Published
- 2000-05-29
- Volume
- 76
- Issue
- 22
- Pages
- 3221-3223
- ISSN
- 0003-6951 (ISSN-L)
- 1077-3118
- OpenAlex
- W2085955851
- Cited by
- 139
- References
- 8
- Citations by year
- 2025: 5 · 2024: 1 · 2023: 2 · 2022: 6 · 2021: 4 · 2020: 4 · 2019: 1 · 2018: 5 · 2017: 9 · 2016: 3 · 2015: 8 · 2014: 6 · 2013: 5 · 2012: 7
- FWCI
- 11.67
- Type
- journal article
- Language
- en
- Open access
- closed
- Locations
- Applied Physics Letters (publishedVersion)
- Topics
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Microwave and Dielectric Measurement Techniques
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Terahertz technology and applications
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Electromagnetic Simulation and Numerical Methods
- Keywords
- permittivity measurement, thin films, theoretical model
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