A high-yield microassembly structure for three-dimensional microelectrode arrays
Abstract
This paper presents a practical microassembly process for three-dimensional (3-D) microelectrode arrays for recording and stimulation in the central nervous system (CNS). Orthogonal lead transfers between the micromachined two-dimensional probes and a cortical surface platform are formed by attaching gold beams on the probes to pads on the platform using wire-free ultrasonic bonding. The low-profile (150 microns) outrigger design of the probes allows the bonding of fully assembled high-density arrays. Micromachined assembly tools allow the formation of a full 3-D probe array within 30 min. Arrays having up to 8 x 16 shanks on 200-micron centers have been realized and used to record cortical single units successfully. Active 3-D probe arrays containing on-chip CMOS signal processing circuitry have also been created using the microassembly approach. In addition, a dynamic insertion technique has been explored to allow the implantation of high-density probe arrays into feline cortex at high-speed and with minimal traumatic injury.
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Fabrication of 3D microneedle electrodes by assembling 2D probe combs or etching bulk materials is expensive and time consuming.
“Because these approaches require special equipment or platforms, microneedle structures that are fabricated either by assembling 2D probe combs or etching bulk materials are expensive and time consuming.”
From A flexible three-dimensional electrode mesh: An enabling technology for wireless brain–computer interface prostheses (2016) · cites this paper as [8]
Some neural interface devices have been fabricated with high electrode densities, but their designs have limited their use to specific central nervous system structures such as cortical grey matter or hippocampal slices.
“Some neural interface devices have been fabricated with high electrode densities; however, their designs have limited the use of these arrays to specific central nervous system structures, such as cortical grey matter (6.25 electrodes/mm 2 [12,13]; >150 electrodes/mm 2 [17,18]) or hippocampal slices (<11 electrodes/mm 2 [19]).”
From A new high-density (25 electrodes/mm<sup>2</sup>) penetrating microelectrode array for recording and stimulating sub-millimeter neuroanatomical structures (2013) · cites this paper as [12]
Cites
A method for the study of undecalcified bones and teeth with attached soft tissues*
Donath, K., & Breuner, G. (1982) · Journal of Oral Pathology and Medicine · doi:10.1111/j.1600-0714.1982.tb00172.x · Cited by 1,640 · see citing works
Gamma (40-100 Hz) oscillation in the hippocampus of the behaving rat
Bragin, A., Jando, G., Nadasdy, Z., Hetke, J., Wise, K., & Buzsaki, G. (1995) · The Journal of Neuroscience · doi:10.1523/jneurosci.15-01-00047.1995 · Cited by 1,527 · see citing works
Self-citationCampbell, P. K., Jones, K. E., Huber, R. J., Horch, K. W., & Normann, R. A. (1991) · IEEE Transactions on Biomedical Engineering · doi:10.1109/10.83588 · Cited by 881 · see citing works
Factors influencing the biocompatibility of insertable silicon microshafts in cerebral cortex
Edell, D. J., Toi, V. V., McNeil, V. M., & Clark, L. D. (1992) · IEEE Transactions on Biomedical Engineering · doi:10.1109/10.141202 · Cited by 479 · see citing works
A three-dimensional microelectrode array for chronic neural recording
Hoogerwerf, A. C., & Wise, K. D. (1994) · IEEE Transactions on Biomedical Engineering · doi:10.1109/10.335862 · Cited by 372 · see citing works
Self-citationA method for pneumatically inserting an array of penetrating electrodes into cortical tissue
Rousche, P. J., & Normann, R. A. (1992) · Annals of Biomedical Engineering · doi:10.1007/bf02368133 · Cited by 305 · see citing works
A high-yield IC-compatible multichannel recording array
Najafi, K., Wise, K. D., & Mochizuki, T. (1985) · IEEE Transactions on Electron Devices · doi:10.1109/t-ed.1985.22102 · Cited by 303 · see citing works
Self-citationSingle-unit neural recording with active microelectrode arrays
Bai, Q., & Wise, K. D. (2001) · IEEE Transactions on Biomedical Engineering · doi:10.1109/10.936367 · Cited by 214 · see citing works
Self-citationSilicon ribbon cables for chronically implantable microelectrode arrays
Hetke, J. F., Lund, J. L., Najafi, K., Wise, K. D., & Anderson, D. J. (1994) · IEEE Transactions on Biomedical Engineering · doi:10.1109/10.284959 · Cited by 174 · see citing works
Self-citationAn implantable CMOS circuit interface for multiplexed microelectrode recording arrays
Ji, J., & Wise, K. D. (1992) · IEEE Journal of Solid-State Circuits · doi:10.1109/4.121568 · Cited by 173 · see citing works
Self-citationLepselter, M. P. (1966) · Bell System Technical Journal · doi:10.1002/j.1538-7305.1966.tb00018.x · Cited by 163 · see citing works
Multiple single-unit recordings from the CNS using thin-film electrode arrays
Carter, R. R., & Houk, J. C. (1993) · IEEE Transactions on Rehabilitation Engineering · doi:10.1109/86.279266 · Cited by 34 · see citing works
A 64-site Multiplexed Low-profile Neural Probe With On-chip Cmos Circuitry
Kim, C., & Wise, K. D. (2005) · doi:10.1109/vlsic.1994.586234 · Cited by 10 · see citing works
Self-citationA High-Yield Process for Three-Dimensional Microelectrode Arrays
Bai, Q., & Kuo, A. D. (1996) · Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshop) · doi:10.31438/trf.hh1996.59 · Cited by 10 · see citing works
Self-citationBielen, J. A., Schmidt, A., Weiel, R., & Rutten, W. L. C. (2002) · Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC) · doi:10.1109/iembs.1996.656947 · Cited by 9 · see citing works
Frieswijk, T. A., & Rutten, W. L. C. (2002) · Proceedings of the Annual International Conference of the IEEE Engineering in Medicine and Biology Society · doi:10.1109/iembs.1994.415155 · Cited by 7 · see citing works
A technique for electrically inserting electrode arrays into peripheral nerves
Smit, J. P. A., & Rutten, W. L. C. (2002) · Proceedings of the Annual International Conference of the IEEE Engineering in Medicine and Biology Society · doi:10.1109/iembs.1994.415150 · Cited by 4 · see citing works
Edwards, C., Finger, P. A., Anderson, D., Wiler, J. A., Hetke, J. F., & Altschuler, R. A. (1997) · Microscopy and Microanalysis · doi:10.1017/s1431927600008643 · Cited by 2 · see citing works
Self-citation
Flagged first, then by citations
2 of the 20 references couldn’t be matched to a known paper.
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Microneedles for drug and vaccine delivery
Kim, Y., Park, J., & Prausnitz, M. R. (2012) · Advanced Drug Delivery Reviews · doi:10.1016/j.addr.2012.04.005 · Cited by 1,776 · see citing works
Wireless Implantable Microsystems: High-Density Electronic Interfaces to the Nervous System
Wise, K. D., Anderson, D. J., Hetke, J. F., Kipke, D. R., & Najafi, K. (2004) · Proceedings of the IEEE · doi:10.1109/jproc.2003.820544 · Cited by 656 · see citing works
Self-citationMaterials for flexible bioelectronic systems as chronic neural interfaces
Song, E., Li, J., Won, S. M., Bai, W., & Rogers, J. A. (2020) · Nature Materials · doi:10.1038/s41563-020-0679-7 · Cited by 498 · see citing works
Chronic Neural Recording Using Silicon-Substrate Microelectrode Arrays Implanted in Cerebral Cortex
Vetter, R. J., Williams, J. C., Hetke, J. F., Nunamaker, E. A., & Kipke, D. R. (2004) · IEEE Transactions on Biomedical Engineering · doi:10.1109/tbme.2004.826680 · Cited by 477 · see citing works
Kipke, D. R., Vetter, R. J., Williams, J. C., & Hetke, J. F. (2003) · IEEE Transactions on Neural Systems and Rehabilitation Engineering · doi:10.1109/tnsre.2003.814443 · Cited by 364 · see citing works
Microelectrodes, Microelectronics, and Implantable Neural Microsystems
Wise, K. D., Sodagar, A. M., Yao, Y., Gulari, M. N., Perlin, G. E., & Najafi, K. (2008) · Proceedings of the IEEE · doi:10.1109/jproc.2008.922564 · Cited by 336 · see citing works
Self-citationTools for Probing Local Circuits: High-Density Silicon Probes Combined with Optogenetics
Buzsáki, G., Stark, E., Berényi, A., Khodagholy, D., Kipke, D. R., Yoon, E., & Wise, K. D. (2015) · Neuron · doi:10.1016/j.neuron.2015.01.028 · Cited by 328 · see citing works
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Ashraf, M. W., Tayyaba, S., & Afzulpurkar, N. (2011) · International Journal of Molecular Sciences · doi:10.3390/ijms12063648 · Cited by 266 · see citing works
A three-dimensional neural recording microsystem with implantable data compression circuitry
Olsson, R. H., & Wise, K. D. (2005) · IEEE Journal of Solid-State Circuits · doi:10.1109/jssc.2005.858479 · Cited by 245 · see citing works
Self-citationWireless multichannel biopotential recording using an integrated FM telemetry circuit
Mohseni, P., Najafi, K., Eliades, S. J., & Wang, X. (2005) · IEEE Transactions on Neural Systems and Rehabilitation Engineering · doi:10.1109/tnsre.2005.853625 · Cited by 220 · see citing works
Single-unit neural recording with active microelectrode arrays
Bai, Q., & Wise, K. D. (2001) · IEEE Transactions on Biomedical Engineering · doi:10.1109/10.936367 · Cited by 214 · see citing works
Self-citationSpataro, L. E., Dilgen, J., Retterer, S. T., Spence, A. J., Isaacson, M. S., Turner, J. N., & Shain, W. G. (2005) · Experimental Neurology · doi:10.1016/j.expneurol.2004.08.037 · Cited by 215 · see citing works
Rauschecker, J. P., & Shannon, R. V. (2002) · Science · doi:10.1126/science.1067796 · Cited by 215 · see citing works
Silicon microsystems for neuroscience and neural prostheses
Wise, K. D. (2005) · IEEE Engineering in Medicine and Biology Magazine · doi:10.1109/memb.2005.1511497 · Cited by 194 · see citing works
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Hajj-Hassan, M., Chodavarapu, V. P., & Musallam, S. (2008) · Sensors · doi:10.3390/s8106704 · Cited by 190 · see citing works
Implantable neurotechnologies: a review of micro- and nanoelectrodes for neural recording
Patil, A. C., & Thakor, N. V. (2016) · Medical & Biological Engineering & Computing · doi:10.1007/s11517-015-1430-4 · Cited by 175 · see citing works
Szostak, K. M., Grand, L., & Constandinou, T. G. (2017) · Frontiers in Neuroscience · doi:10.3389/fnins.2017.00665 · Cited by 170 · see citing works
Patel, P. R., Na, K., Zhang, H., Kozai, T. D. Y., Kotov, N. A., Yoon, E., & Chestek, C. A. (2015) · Journal of Neural Engineering · doi:10.1088/1741-2560/12/4/046009 · Cited by 160 · see citing works
Polyimide-based intracortical neural implant with improved structural stiffness
Lee, K.-K., He, J., Singh, A., Massia, S. P., Ehteshami, G., Kim, B., & Raupp, G. B. (2003) · Journal of Micromechanics and Microengineering · doi:10.1088/0960-1317/14/1/305 · Cited by 161 · see citing works
Wark, H. A. C., Sharma, R., Mathews, K. S., Fernandez, E., Yoo, J., Christensen, B., Tresco, P., Rieth, L., Solzbacher, F., Normann, R. A., et al. (2013) · Journal of Neural Engineering · doi:10.1088/1741-2560/10/4/045003 · Cited by 148 · see citing works
Implantable intracortical microelectrodes: reviewing the present with a focus on the future
Wang, Y., Yang, X., Zhang, X., Wang, Y., & Pei, W. (2023) · Microsystems & Nanoengineering · doi:10.1038/s41378-022-00451-6 · Cited by 145 · see citing works
Yazdi, N., & Najafi, K. (2000) · Journal of Microelectromechanical Systems · doi:10.1109/84.896777 · Cited by 129 · see citing works
Maynard, E. M. (2001) · Annual Review of Biomedical Engineering · doi:10.1146/annurev.bioeng.3.1.145 · Cited by 126 · see citing works
Perelman, Y., & Ginosar, R. (2007) · IEEE Transactions on Biomedical Engineering · doi:10.1109/tbme.2006.883732 · Cited by 116 · see citing works
Herwik, S., Kisban, S., Aarts, A. A. A., Seidl, K., Girardeau, G., Benchenane, K., Zugaro, M. B., Wiener, S. I., Paul, O., Neves, H. P., et al. (2009) · Journal of Micromechanics and Microengineering · doi:10.1088/0960-1317/19/7/074008 · Cited by 113 · see citing works
Toward a self-deploying shape memory polymer neuronal electrode
Sharp, A. A., Panchawagh, H. V., Ortega, A., Artale, R., Richardson-Burns, S., Finch, D. S., Gall, K., Mahajan, R. L., & Restrepo, D. (2006) · Journal of Neural Engineering · doi:10.1088/1741-2560/3/4/l02 · Cited by 113 · see citing works
Conducting polymer coated neural recording electrodes
Harris, A. R., Morgan, S. J., Chen, J., Kapsa, R. M. I., Wallace, G. G., & Paolini, A. G. (2012) · Journal of Neural Engineering · doi:10.1088/1741-2560/10/1/016004 · Cited by 112 · see citing works
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Wise, K. D. (2007) · Sensors and Actuators A Physical · doi:10.1016/j.sna.2007.02.013 · Cited by 108 · see citing works
Self-citationChen, Y., Lai, H.-Y., Lin, S.-H., Chao, W.-H., Chao, W.-H., Liao, C., Tsang, S., Chen, Y., & Lin, S.-Y. (2009) · Journal of Neuroscience Methods · doi:10.1016/j.jneumeth.2009.05.010 · Cited by 110 · see citing works
Wafer-scale fabrication of penetrating neural microelectrode arrays
Bhandari, R., Negi, S., & Solzbacher, F. (2010) · Biomedical Microdevices · doi:10.1007/s10544-010-9434-1 · Cited by 107 · see citing works
Xiang, Z., Liu, J., & Lee, C. (2016) · Microsystems & Nanoengineering · doi:10.1038/micronano.2016.12 · Cited by 100 · see citing works
Recent advances in silicon-based neural microelectrodes and microsystems: a review
Fekete, Z. (2015) · Sensors and Actuators B Chemical · doi:10.1016/j.snb.2015.03.055 · Cited by 99 · see citing works
Polyimide based neural implants with stiffness improvement
Lee, K., Singh, A., He, J., Massia, S. P., Kim, B., & Raupp, G. B. (2004) · Sensors and Actuators B Chemical · doi:10.1016/j.snb.2003.10.018 · Cited by 98 · see citing works
A 250 μm × 57 μm Microscale Opto-electronically Transduced Electrodes (MOTEs) for Neural Recording
Lee, S., Cortese, A. J., Gandhi, A. P., Agger, E. R., McEuen, P. L., & Molnar, A. C. (2018) · IEEE Transactions on Biomedical Circuits and Systems · doi:10.1109/tbcas.2018.2876069 · Cited by 82 · see citing works
Recent Progress in Neural Probes Using Silicon MEMS Technology
Ruther, P., Herwik, S., Kisban, S., Seidl, K., & Paul, O. (2010) · IEEJ Transactions on Electrical and Electronic Engineering · doi:10.1002/tee.20566 · Cited by 82 · see citing works
Spatiotemporal pH dynamics following insertion of neural microelectrode arrays
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Implantable multichannel electrode array based on soi technology
Cheung, K. C., Djupsund, K., Dan, Y., & Lee, L. P. (2003) · Journal of Microelectromechanical Systems · doi:10.1109/jmems.2003.809962 · Cited by 81 · see citing works
Du, J., Riedel-Kruse, I. H., Nawroth, J. C., Roukes, M. L., Laurent, G., & Masmanidis, S. C. (2008) · Journal of Neurophysiology · doi:10.1152/jn.90992.2008 · Cited by 80 · see citing works
Microelectrode Array Fabrication by Electrical Discharge Machining and Chemical Etching
Fofonoff, T., Martel, S. M., Hatsopoulos, N. G., Donoghue, J. P., & Hunter, I. W. (2004) · IEEE Transactions on Biomedical Engineering · doi:10.1109/tbme.2004.826679 · Cited by 79 · see citing works
Biocompatible benzocyclobutene (BCB)-based neural implants with micro-fluidic channel
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Fujishiro, A., Kaneko, H., Kawashima, T., Ishida, M., & Kawano, T. (2014) · Scientific Reports · doi:10.1038/srep04868 · Cited by 71 · see citing works
Seidl, K., Herwik, S., Torfs, T., Neves, H. P., Paul, O., & Ruther, P. (2011) · Journal of Microelectromechanical Systems · doi:10.1109/jmems.2011.2167661 · Cited by 68 · see citing works
Challenges for Large-Scale Cortical Interfaces
Nurmikko, A. (2020) · Neuron · doi:10.1016/j.neuron.2020.10.015 · Cited by 68 · see citing works
Rennaker, R. L., Street, S. E., Ruyle, A. M., & Sloan, A. M. (2004) · Journal of Neuroscience Methods · doi:10.1016/j.jneumeth.2004.08.009 · Cited by 68 · see citing works
Heim, M., Yvert, B., & Kuhn, A. (2011) · Journal of Physiology-Paris · doi:10.1016/j.jphysparis.2011.10.001 · Cited by 68 · see citing works
SiC protective coating for photovoltaic retinal prosthesis
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Patel, P. R., Popov, P., Caldwell, C. M., Welle, E. J., Egert, D., Pettibone, J. R., Roossien, D. H., Becker, J. B., Berke, J. D., Chestek, C. A., et al. (2020) · Journal of Neural Engineering · doi:10.1088/1741-2552/abb1f6 · Cited by 54 · see citing works
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Rutten, W. L. C., Mouveroux, J. M. P., Buitenweg, J. R., Heida, T., Ruardij, T. G., Marani, E., & Lakke, E. A. J. F. (2001) · Proceedings of the IEEE · doi:10.1109/5.939810 · Cited by 46 · see citing works
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Rakwal, D., Heamawatanachai, S., Tathireddy, P., Solzbacher, F., & Bamberg, E. (2009) · Microsystem Technologies · doi:10.1007/s00542-009-0792-7 · Cited by 39 · see citing works
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Rajaraman, S., Choi, S., McClain, M. A., Ross, J. D., LaPlaca, M. C., & Allen, M. G. (2011) · Journal of Microelectromechanical Systems · doi:10.1109/jmems.2011.2105253 · Cited by 38 · see citing works
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Self-citationFekete, Z., Németh, A., Márton, G., Ulbert, I., & Pongracz, A. (2015) · Journal of Materials Science Materials in Medicine · doi:10.1007/s10856-015-5401-y · Cited by 34 · see citing works
A shuttered probe with in-line flowmeters for chronic in-vivo drug delivery
Papageorgiou, D., Bledsoe, S. C., Gulari, M. N., Hetke, J. F., Anderson, D. J., & Wise, K. D. (2002) · IEEE International Conference on Micro Electro Mechanical Systems (MEMS) · doi:10.1109/memsys.2001.906516 · Cited by 33 · see citing works
Self-citationHeld, J., Gaspar, J., Ruther, P., Hagner, M., Cismak, A., Heilmann, A. M. F., & Paul, O. (2010) · Journal of Micromechanics and Microengineering · doi:10.1088/0960-1317/20/2/025024 · Cited by 30 · see citing works
A three-dimensional neural recording microsystem with implantable data compression circuitry
Olsson, R. H., & Wise, K. D. (2005) · Digest of technical papers/Digest of technical papers - IEEE International Solid-State Circuits Conference · doi:10.1109/isscc.2005.1494117 · Cited by 31 · see citing works
Self-citationA novel multisite silicon probe for high quality laminar neural recordings
Grand, L., Pongracz, A., Vázsonyi, É. B., Márton, G., Gubán, D., Fiáth, R., Kerekes, B. P., Karmos, G., Ulbert, I., & Battistig, G. (2010) · Sensors and Actuators A Physical · doi:10.1016/j.sna.2010.12.019 · Cited by 30 · see citing works
Lee, S., Cortese, A. J., Mok, A. T. Y., Wu, C., Wang, T., Park, J. U., Smart, C. L., Ghajari, S., Khilwani, D., Sadeghi, S., et al. (2020) · Journal of Microelectromechanical Systems · doi:10.1109/jmems.2020.2999496 · Cited by 30 · see citing works
A 3-D 160-Site Microelectrode Array for Cochlear Nucleus Mapping
Merriam, M. E., Dehmel, S., Srivannavit, O., Shore, S. E., & Wise, K. D. (2010) · IEEE Transactions on Biomedical Engineering · doi:10.1109/tbme.2010.2088122 · Cited by 30 · see citing works
Self-citationCurvy surface conformal ultra-thin transfer printed Si optoelectronic penetrating microprobe arrays
Sim, K., Rao, Z., Li, Y., Yang, D., & Yu, C. (2018) · npj Flexible Electronics · doi:10.1038/s41528-017-0015-8 · Cited by 30 · see citing works
CMOS Neural Probe With 1600 Close-Packed Recording Sites and 32 Analog Output Channels
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Analog frontend for multichannel neuronal recording system with spike and LFP separation
Perelman, Y., & Ginosar, R. (2005) · Journal of Neuroscience Methods · doi:10.1016/j.jneumeth.2005.09.017 · Cited by 30 · see citing works
Single 5 μm diameter needle electrode block modules for unit recordings in vivo
Sawahata, H., Yamagiwa, S., Moriya, A., Dong, T., Oi, H., Ando, Y., Numano, R., Ishida, M., Koida, K., & Kawano, T. (2016) · Scientific Reports · doi:10.1038/srep35806 · Cited by 28 · see citing works
Rennaker, R. L., Ruyle, A. M., Street, S. E., & Sloan, A. M. (2004) · Journal of Neuroscience Methods · doi:10.1016/j.jneumeth.2004.07.018 · Cited by 28 · see citing works
Development of a Three Dimensional Neural Sensing Device by a Stacking Method
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A 3D slim-base probe array for in vivo recorded neuron activity
Aarts, A. A. A., Neves, H. P., Ulbert, I., Wittner, L., Grand, L., Fontes, M., Herwik, S., Kisban, S., Paul, O., Ruther, P., et al. (2008) · Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC) · doi:10.1109/iembs.2008.4650532 · Cited by 26 · see citing works
Toward a Button‐Sized 1024‐Site Wireless Cortical Microstimulating Array
Ghovanloo, M., & Najafi, K. (2006) · Wiley eBooks · doi:10.1002/9780470068298.ch23 · Cited by 26 · see citing works
Implantable neural probe systems for cortical neuroprostheses
Kipke, D. R. (2005) · Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC) · doi:10.1109/iembs.2004.1404492 · Cited by 25 · see citing works
A Cortical Recording Platform Utilizing ¿ECoG Electrode Arrays
Kim, J., Wilson, J. A., & Williams, J. C. (2007) · Conference proceedings · doi:10.1109/iembs.2007.4353551 · Cited by 24 · see citing works
Microassembly Fabrication of Tissue Engineering Scaffolds With Customized Design
Zhang, H., Burdet, E., POO, A. N., & Hutmacher, D. W. (2008) · IEEE Transactions on Automation Science and Engineering · doi:10.1109/tase.2008.917011 · Cited by 24 · see citing works
Novel four-sided neural probe fabricated by a thermal lamination process of polymer films
Shin, S., Kim, J., Jeong, J., Gwon, T. M., Lee, S., & Kim, S. J. (2016) · Journal of Neuroscience Methods · doi:10.1016/j.jneumeth.2016.12.017 · Cited by 24 · see citing works
The Impact of Neurotechnology on Rehabilitation
Berger, T., Gerhardt, G., Liker, M., & Soussou, W. (2008) · IEEE Reviews in Biomedical Engineering · doi:10.1109/rbme.2008.2008687 · Cited by 25 · see citing works
Towards a button-sized 1024-site wireless cortical microstimulating array
Ghovanloo, M., Wise, K. D., & Najafi, K. (2003) · International IEEE/EMBS Conference on Neural Engineering · doi:10.1109/cne.2003.1196776 · Cited by 24 · see citing works
Self-citationEasy-to-Prepare Assembly Array of Tungsten Microelectrodes
Takahashi, H., Suzurikawa, J., Nakao, M., Mase, F., & Kaga, K. (2005) · IEEE Transactions on Biomedical Engineering · doi:10.1109/tbme.2005.845224 · Cited by 23 · see citing works
Novel glass microprobe arrays for neural recording
Lin, C.-W., Lee, Y., Chang, C.-W., Hsu, W.-L., Chang, Y., & Fang, W. (2009) · Biosensors and Bioelectronics · doi:10.1016/j.bios.2009.08.006 · Cited by 23 · see citing works
A self-assembled 3D microelectrode array
Wang, M.-F., Maleki, T., & Ziaie, B. (2010) · Journal of Micromechanics and Microengineering · doi:10.1088/0960-1317/20/3/035013 · Cited by 22 · see citing works
- Authors
- Bai, Q., Wise, K. D., & Anderson, D. J.
- Affiliations
- University of Michigan (US)
- Venue
- IEEE Transactions on Biomedical Engineering
- Published
- 2000-03
- Volume
- 47
- Issue
- 3
- Pages
- 281-289
- ISSN
- 0018-9294 (ISSN-L)
- OpenAlex
- W2161272185
- Cited by
- 245
- References
- 20
- Citations by year
- 2025: 5 · 2023: 4 · 2022: 8 · 2021: 6 · 2020: 7 · 2019: 5 · 2018: 6 · 2017: 7 · 2016: 14 · 2015: 8 · 2014: 7 · 2013: 11 · 2012: 7
- FWCI
- 2.84
- Type
- journal article
- Language
- en
- Open access
- closed
- Locations
- IEEE Transactions on Biomedical Engineering (publishedVersion)
- PubMed (publishedVersion)
- Topics
- Life Sciences › Neuroscience › Cellular and Molecular Neuroscience › Neuroscience and Neural Engineering
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Advanced MEMS and NEMS Technologies
- Physical Sciences › Engineering › Biomedical Engineering › Analog and Mixed-Signal Circuit Design
- Keywords
- microassembly, ultrasonic bonding, cortical recording, single-unit recording, neurostimulation
- MeSH terms
- Animals, Auditory Cortex, Brain, Cats, Electrodes, Implanted, Electroencephalography, Equipment Design, Gold, Guinea Pigs, Microelectrodes, Signal Processing, Computer-Assisted, Silicon, Microscopy, Confocal
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