Cited by 884Neuroscience and Neural EngineeringAnalog and Mixed-Signal Circuit DesignAdvanced MEMS and NEMS Technologies

The DOI matches its Crossref record; 20 of the 24 references it cites were found in a registry or an index.

A silicon-based, three-dimensional neural interface: manufacturing processes for an intracortical electrode array

Campbell, P.K., Jones, K.E., Huber, R.J., Horch, K.W., Normann, R.A.·1991·IEEE Transactions on Biomedical Engineering

DOI 10.1109/10.83588

Open this paper in CoChat — free account

Abstract

A method has been developed for the manufacture of a "three-dimensional" electrode array geometry for chronic intracortical stimulation. This silicon based array consists of a 4.2 x 4.2 x 0.12 mm thick monocrystalline substrate, from which project 100 conductive, silicon needles sharpened to facilitate cortical penetration. Each needle is electrically isolated from the other needles, and is about 0.09 mm thick at its base and 1.5 mm long. The sharpened end of each needle is coated with platinum to facilitate charge transfer into neural tissue. The following manufacturing processes were used to create this array. 1) Thermomigration of 100 aluminum pads through an n-type silicon block. This creates trails of highly conductive p+ silicon isolated from each other by opposing pn junctions. 2) A combination of mechanical and chemical micromachining which creates individual penetrating needles of the p+ silicon trails. 3) Metal deposition to create active electrode areas and electrical contact pads. 4) Array encapsulation with polyimide. The geometrical, mechanical, and electrical properties of these arrays should make them well suited as interfaces to cortical tissue.

Integrity signals

Registry

Crossref · 10.1109/10.83588

Cites

20 of 20 references verified0 citation errors · 0 not checkable

Statistics

Recomputing p-values needs the paper’s full text.

Claims the paper makes

This paper’s full text isn’t openly available, so its claims and self-check weren’t run. The registry and citation checks still apply.

Claims other papers make about this one

Each is checked against this paper’s own text: does it say what the citing paper says it does?

The sensations produced by electrical stimulation of the visual cortex
Brindley, G. S., & Lewin, W. S. (1968) · The Journal of Physiology · doi:10.1113/jphysiol.1968.sp008519 · Cited by 1,170
Phosphenes produced by electrical stimulation of human occipital cortex, and their application to the development of a prosthesis for the blind
Dobelle, W. H., & Mladejovsky, M. G. (1974) · The Journal of Physiology · doi:10.1113/jphysiol.1974.sp010766 · Cited by 468
Chemical Etching of Silicon: IV . Etching Technology
Schwartz, B., & Robbins, H. (1976) · Journal of The Electrochemical Society · doi:10.1149/1.2132721 · Cited by 355
Batch fabricated thin-film electrodes for stimulation of the central auditory system
Anderson, D. J., Najafi, K., Tanghe, S., Evans, D. A., Levy, K., Hetke, J. F., Xue, X., Zappia, J. J., & Wise, K. D. (1989) · IEEE Transactions on Biomedical Engineering · doi:10.1109/10.32101 · Cited by 229
Chemical Etching of Silicon
Robbins, H., & Schwartz, B. (1960) · Journal of The Electrochemical Society · doi:10.1149/1.2427617 · Cited by 199
A Peripheral Nerve Information Transducer for Amputees: Long-Term Multichannel Recordings from Rabbit Peripheral Nerves
Edell, D. J. (1986) · IEEE Transactions on Biomedical Engineering · doi:10.1109/tbme.1986.325892 · Cited by 177
Thin-Film Multiple Electrode Probes: Possibilities and Limitations
Prohaska, O. J., Olcaytug, F., Pfundner, P., & Dragaun, H. (1986) · IEEE Transactions on Biomedical Engineering · doi:10.1109/tbme.1986.325894 · Cited by 103
Mechanical factors in the design of chronic recording intracortical microelectrodes
Goldstein, S. R., & Salcman, M. (1973) · IEEE Transactions on Biomedical Engineering · doi:10.1109/tbme.1973.324190 · Cited by 53
A 100 electrode intracortical array: structural variability.
Campbell, P. K., Jones, K. E., & Normann, R. A. (1990) · PubMed · Cited by 35
Self-citation
Photolithographic Fabrication and Physiological Performance of Microelectrode Arrays for Neural Stimulation
Mercer, H. D., & White, R. L. (1978) · IEEE Transactions on Biomedical Engineering · doi:10.1109/tbme.1978.326282 · Cited by 33

Flagged first, then by citations

Show all 24 references

4 of the 24 references couldn’t be matched to a known paper.

Research works printed but not linked: 4

eichenbaum, 1986, Extracellular neural recording with multichannel microelectrodes, J Electrophysiol Tech, 13, 189
hahn, 1987, Innovative techniques for protective coatings of neural prosthetic devices Material development and evaluation
penfield, 1950, The Cerebral Cortex of Man
de yoe, 1983, An investigation in the awake macaque of the threshold for detection of electrical currents applied to striate cortex Psychophysical properties and laminar differences

Sorted by citations

Items 501–600 of 884

Overview of Microneedles
Aoyagi, S. (2016) · Journal of the Japan Society for Precision Engineering · doi:10.2493/jjspe.82.999 · Cited by 8
Electrodes and instrumentation for neurostimulation
Merrill, D. R. (2021) · Elsevier eBooks · doi:10.1016/b978-0-12-822828-9.00002-2 · Cited by 9
Factors affecting degradation of sputtered iridium oxide used for neuroprosthetic applications
Negi, S., Bhandari, R., Wagenen, R. V., & Solzbacher, F. (2010) · IEEE International Conference on Micro Electro Mechanical Systems (MEMS) · doi:10.1109/memsys.2010.5442438 · Cited by 8
Integration of silicon-via electrodes with different recording characteristics on a glass microprobe using a glass reflowing process
Lee, Y., Yeh, S., Chang, Y., & Fang, W. (2011) · Biosensors and Bioelectronics · doi:10.1016/j.bios.2011.05.037 · Cited by 8
Ambitions for theory in the physics of life
Bialek, W. (2024) · SciPost Physics Lecture Notes · doi:10.21468/scipostphyslectnotes.84 · Cited by 11
Integration of catheter flow sensor onto tracheal intubation tube system
Matsuyama, T., Yoshikawa, K., Yamazaki, Y., Shikida, M., Matsushima, M., & Kawabe, T. (2013) · IEEE International Conference on Micro Electro Mechanical Systems (MEMS) · doi:10.1109/memsys.2013.6474426 · Cited by 8
Conductive microtip electrode array with variable aspect ratio using combination process of reactive ion etching
Ha, J.-G., Lee, S.-K., Bai, S. J., Kim, Y.-K., & Park, J. (2013) · Journal of Micromechanics and Microengineering · doi:10.1088/0960-1317/23/11/115009 · Cited by 8
Electrocorticographic activity over sensorimotor cortex and motor function in awake behaving rats
Boulay, C., Chen, X. Y., & Wolpaw, J. R. (2015) · Journal of Neurophysiology · doi:10.1152/jn.00677.2014 · Cited by 8
Wafer-scale processed, low impedance, neural arrays with varying length microelectrodes
Bhandari, R., Negi, S., Rieth, L. W., & Solzbacher, F. (2009) · International Conference on Solid-State Sensors, Actuators and Microsystems · doi:10.1109/sensor.2009.5285875 · Cited by 8
Augmentation of Sensorimotor Functions with Neural Prostheses
Lebedev, M. (2016) · Russian Agency for Digital Standardization · doi:10.20388/omp2016.003.0035 · Cited by 8
Simulation-based optimization of out-of-plane, variable-height, convoluted quartz micro needle arrays via single-step anisotropic wet etching
Xing, Y. F., Qian, J. W., Gosálvez, M. A., Zhang, J., & Zhang, Y. (2020) · Microelectronic Engineering · doi:10.1016/j.mee.2020.111375 · Cited by 8
Nano‐ and Microscale Optical and Electrical Biointerfaces and Their Relevance to Energy Research
Hou, K., Yang, C., Shi, J., Kuang, B., & Tian, B. (2021) · Small · doi:10.1002/smll.202100165 · Cited by 8
Development of a Silicon Microneedle with Three-Dimensional Sharp Tip by Electrochemical Etching
Izumi, H., Okamoto, T., Suzuki, M., & Aoyagi, S. (2009) · IEEJ Transactions on Sensors and Micromachines · doi:10.1541/ieejsmas.129.373 · Cited by 8
Fabrication and evaluation of a silicon probe array on a flexible substrate for neural recording
Akamatsu, N., Suzuki, T., Mabuchi, K., Fujita, H., Kim, B., & Takeuchi, S. (2004) · Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC) · doi:10.1109/iembs.2003.1280989 · Cited by 8
A Closed-Loop Deep Brain Stimulation Device With a Logarithmic Pipeline ADC.
Lee, J. (2008) · Deep Blue (University of Michigan) · Cited by 8
Implantable Device Fabrication and Packaging
Stieglitz, T. (2023) · Handbook of Neuroengineering · doi:10.1007/978-981-16-5540-1_102 · Cited by 7
Designing parylene coating for implantable brain–machine interfaces
Ebrahimibasabi, S., Golshahi, M., Shahraki, N., Shabestari, D. T., Sajjadi, M., Hashemi, S., Borchert, A., Baker, I. A., Khalifehzadeh, L., & Arami, H. (2025) · RSC Advances · doi:10.1039/d5ra04683a · Cited by 7
Multi‐Channel Neural Interface for Neural Recording and Neuromodulation
Kim, E.-M., Chung, W. G., Kim, E., Oh, M., Paek, J., Lee, T., Kim, D., An, S. H., Kim, S., & Park, J. (2025) · Small Methods · doi:10.1002/smtd.202501227 · Cited by 9
Laser-patterned epoxy-based 3D microelectrode arrays for extracellular recording
Hu, P., Kopic, I., Potfode, S. R., Teshima, T., Boustani, G. A., Hiendlmeier, L., Wang, C., Hussain, M. Z., Özkale, B., Fischer, R. A., et al. (2024) · Nanoscale · doi:10.1039/d4nr01727g · Cited by 7
In vivo optogenetics using a Utah Optrode Array with enhanced light output and spatial selectivity
McAlinden, N., Reiche, C. F., Clark, A. M., Scharf, R. D., Cheng, Y., Sharma, R., Rieth, L. W., Dawson, M. D., Angelucci, A., Mathieson, K., et al. (2024) · Journal of Neural Engineering · doi:10.1088/1741-2552/ad69c3 · Cited by 7
Recent Advances in Intracortical Neural Interfaces for Freely Moving Animals: Technologies and Applications
Cai, X., Xu, Z., Liu, J., Wang, R., & Wu, Y. (2024) · Engineering · doi:10.1016/j.eng.2024.12.012 · Cited by 7
Flexible thin film electrode arrays for minimally-invasive neurological monitoring
Kim, J., Richner, T. J., Thongpang, S., Sillay, K. A., Niemann, D., Ahmed, A. S., Krugner-Higby, L. A., & Williams, J. C. (2009) · Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC) · doi:10.1109/iembs.2009.5333177 · Cited by 7
Micro-machined stent flow sensor for detecting breathing and heartbeat from airflow in airway of rat
Noma, H., Hasegawa, Y., Matsushima, M., Kawabe, T., & Shikida, M. (2020) · Journal of Micromechanics and Microengineering · doi:10.1088/1361-6439/abd07a · Cited by 7
Healthcare Applications of 3D Printing in Human Implants: A Review
Singh, S., Urooj, S., Batra, N., & Kalathil, S. (2020) · IEEE India Conference · doi:10.1109/indicon49873.2020.9342316 · Cited by 7
Reinforcement of Neuropixels probes for high-density neural recording in non-human primates
Wang, Q., Yin, J., & Cui, H. (2021) · International IEEE/EMBS Conference on Neural Engineering · doi:10.1109/ner49283.2021.9441229 · Cited by 7
Bridging Medicine and Technology for Advancing Patients Care
Karami, M. M. (2024) · Pharmacophore · doi:10.51847/eslcv4vhgl · Cited by 7
Discrete cortical responses from multi-site supra-choroidal electrical stimulation in the feline retina
Suaning, G. J., Kisban, S., Chen, S. C., Byrnes-Preston, P., Dodds, C. W. D., Tsai, D., Matteucci, P. B., Herwik, S., Morley, J. W., Lovell, N. H., et al. (2010) · Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC) · doi:10.1109/iembs.2010.5627527 · Cited by 7
Study of Insertion Characteristics of Si Neural Probe with Sharpened Tip for Minimally Invasive Insertion to Brain
Lee, S., Kanno, S., Kino, H., & Tanaka, T. (2013) · Japanese Journal of Applied Physics · doi:10.7567/jjap.52.04cl04 · Cited by 7
Silicon-based wire electrode array for neural interfaces
Pei, W., Zhao, H., Zhao, S., Fang, X., Chen, S., Gui, Q., Tang, R., Chen, Y., Hong, B., Gao, X., et al. (2014) · Journal of Micromechanics and Microengineering · doi:10.1088/0960-1317/24/9/095015 · Cited by 7
Open-source automated system for assembling a high-density microwire neural recording array
Massey, T. L., Lee, J. H., Ray, M., Sathe, N., Liu, X., Pister, K. S. J., & Maharbiz, M. M. (2016) · International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS) · doi:10.1109/marss.2016.7561750 · Cited by 7
Introduction to Visual Prostheses
Fernández, E., & Normann, R. A. (2016) · Europe PMC (PubMed Central) · Cited by 7
Self-citation
Design and Fabrication of a Three-Dimensional Multi-Electrode Array for Neuron Electrophysiology
Zuo, L., Yu, S., Briggs, C. A., Kantor, S., & Pan, J. (2017) · Journal of Biomechanical Engineering · doi:10.1115/1.4037948 · Cited by 7
Non-photolithographic pattern transfer for fabricating arrayed 3D microstructures by chemical anisotropic etching
Shikida, M., Odagaki, M., Todoroki, N., Ando, M., Ishihara, Y., Ando, T., & Sato, K. (2003) · IEEE International Conference on Micro Electro Mechanical Systems (MEMS) · doi:10.1109/memsys.2003.1189811 · Cited by 7
MEMS based system for drug delivery
Ashraf, M. W., Tayyaba, S., Nisar, A., & Afzulpurkar, N. (2010) · International Conference on Emerging Technologies · doi:10.1109/icet.2010.5638375 · Cited by 7
A gel-based wafer-level testing procedure for microelectrodes
Kindlundh, M., & Peter Norlin, A. (2005) · Sensors and Actuators B Chemical · doi:10.1016/j.snb.2004.11.016 · Cited by 7
Two-dimensional multi-channel neural probes with electronic depth control
Torfs, T., Aarts, A. A. A., Erişmiş, M. A., Aslam, J., Yazıcıoğlu, R. F., Puers, R., Hoof, C. A. V., Neves, H. P., Ulbert, I., Dombovári, B., et al. (2010) · IEEE Biomedical Circuits and Systems Conference (BioCAS) · doi:10.1109/biocas.2010.5709605 · Cited by 7
Live-Cell-Driven Insertion of a Nanoneedle
Hoshino, T., Konno, T., Ishihara, K., & Morishima, K. (2009) · Japanese Journal of Applied Physics · doi:10.1143/jjap.48.107002 · Cited by 7
Nanoneedle-Electrode Devices for In Vivo Recording of Extracellular Action Potentials
Banno, T., Tsuruhara, S., Seikoba, Y., Tonai, R., Yamashita, K., Idogawa, S., Kita, Y., Suzuki, K., Yagi, Y., Kondo, Y., et al. (2022) · ACS Nano · doi:10.1021/acsnano.2c02399 · Cited by 6
Enhancing the Deposition Rate and Uniformity in 3D Gold Microelectrode Arrays via Ultrasonic-Enhanced Template-Assisted Electrodeposition
Yadav, N. K., Giacomozzi, F., Cian, A., Giubertoni, D., & Lorenzelli, L. (2024) · Sensors · doi:10.3390/s24041251 · Cited by 6
A 1280-Channel Neural Microelectrode Array With Complementary Wedge-Shaped 3-D Assembly Interfaces
Geng, L., Yang, Y., Chen, D., Xie, D., Xing, C., He, D., Xu, L., & Wu, F. H. (2024) · IEEE Sensors Journal · doi:10.1109/jsen.2024.3377920 · Cited by 6
3D Parylene sheath probes for reliable, long-term neuroprosthetic recordings
Kuo, J. T. W., Kim, B. J., Hara, S. A., Lee, C. D., Yu, L., Gutierrez, C. A., Hoang, T., Pikov, V., & Meng, E. F. (2013) · IEEE International Conference on Micro Electro Mechanical Systems (MEMS) · doi:10.1109/memsys.2013.6474435 · Cited by 6
MEMS-based microelectrode technologies capable of penetrating neural tissues
Chou, N., Byun, D., & Kim, S. (2014) · Biomedical Engineering Letters · doi:10.1007/s13534-014-0133-3 · Cited by 6
FABRICATION OF 3D PARYLENE SHEATH PROBES FOR RELIABLE NEUROPROSTHETIC RECORDINGS
Kuo, J. T. W., Kim, B. J., Hara, S. A., Lee, C., Gutierrez, C. A., Hoang, T., & Meng, E. F. (2012) · Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshop) · doi:10.31438/trf.hh2012.9 · Cited by 6
Out-of-plane neural microelectrode arrays fabrication using conventional blade dicing
Goncalves, S. B., Oliveira, M., Peixoto, A. C., da Silva, A. F., & Correia, J. H. (2015) · The International Journal of Advanced Manufacturing Technology · doi:10.1007/s00170-015-7948-7 · Cited by 6
Fabrication of bio-microelectrodes for deep-brain stimulation using microfabrication and electroplating process
Qin, G., Liu, Y., Liu, H., Ding, Y., Qi, X., & Du, R. (2009) · Microsystem Technologies · doi:10.1007/s00542-009-0832-3 · Cited by 6
Biomems in medicine: diagnostic and therapeutic systems
Cheung, K. C., & Renaud, P. (2005) · European Solid-State Device Research Conference · doi:10.1109/essder.2005.1546656 · Cited by 6
Scalable, Modular Three-Dimensional Silicon Microelectrode Assembly via Electroless Plating
Scholvin, J., Zorzos, A. N., Kinney, J. P., Bernstein, J., Moore-Kochlacs, C., Kopell, N., Fonstad, C. G., & Boyden, E. S. (2018) · Micromachines · doi:10.3390/mi9090436 · Cited by 6
Electrodes for the Neural Interface
Tyler, D. J. (2018) · Elsevier eBooks · doi:10.1016/b978-0-12-805353-9.00020-6 · Cited by 6
Verification of multi-structure targeting in chronic microelectrode brain recordings from CT scans
Censoni, L., Halje, P., Axelsson, J., Skovgård, K., Ramezani, A., Malinina, E., & Petersson, P. (2022) · Journal of Neuroscience Methods · doi:10.1016/j.jneumeth.2022.109719 · Cited by 6
Development of tube flow sensor by using film transfer technology and its application to in situ breathing and surface image evaluation in airways
Okihara, C., Hasegawa, Y., Matsushima, M., Kawabe, T., & Shikida, M. (2018) · Microsystem Technologies · doi:10.1007/s00542-018-3733-5 · Cited by 6
Use of thermomigration in MEMS technology
Buchin, É. Y., & Denisenko, Y. I. (2006) · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · doi:10.1117/12.683500 · Cited by 6
Surface multipoint microelectrode for direct recording of auditory evoked potentials on the auditory cortex of a rat
Takahashi, H., Ejiri, T., Nakao, M., Matsumoto, K., Mase, F., Hatamura, Y., Hervé, T., Nakamura, N., & Kaga, K. (2002) · International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology (MMB) · doi:10.1109/mmb.2000.893837 · Cited by 6
Electrode–Neural Tissue Interactions: Immune Responses, Current Technologies, and Future Directions
Kim, G. B., Fattahi, P., & Abidian, M. R. (2013) · Wiley eBooks · doi:10.1002/9783527649600.ch19 · Cited by 6
Neural Prostheses
Grill, W. M., & Kirsch, R. F. (1999) · Wiley eBooks · doi:10.1002/047134608x.w1424 · Cited by 6
Evaluation of Pneumatic Insertion Stability of Utah Slanted Electrode Arrays in Rat Sciatic Nerve
Thomas, W. M., Leber, M., Crew, J., & Warren, D. J. (2022) · 2022 44th Annual International Conference of the IEEE Engineering in Medicine & Biology Society (EMBC) · doi:10.1109/embc48229.2022.9871237 · Cited by 5
A mesoscale optogenetics system for precise and robust stimulation of the primate cortex
Li, H., Lu, D., Liao, H., Zhang, J., Tang, J., He, F., Li, L., Zhang, Y., Leng, X., Li, C., et al. (2026) · Neuron · doi:10.1016/j.neuron.2025.12.001 · Cited by 6
Coupled Eulerian–Lagrangian model prediction of neural tissue strain during microelectrode insertion
O'Sullivan, K. P., & Coats, B. (2024) · Journal of Neural Engineering · doi:10.1088/1741-2552/ad68a6 · Cited by 5
Fabrication and implantation of hydrogel coated, flexible polyimide electrodes
Hassler, C., Ehler, N., Singh, V., Xie, Y., Martini, N., Kirch, R. D., Prucker, O., Rühe, J., Hofmann, U., & Stieglitz, T. (2015) · International IEEE/EMBS Conference on Neural Engineering · doi:10.1109/ner.2015.7146684 · Cited by 5
LiNbO3-Based Synaptic Sensors via Microring Resonator Modulators
Babayiğit, C., Esfandyarpour, R., & Boyraz, O. (2024) · IEEE Sensors Journal · doi:10.1109/jsen.2024.3402152 · Cited by 5
Brain-computer interface
Farzan, F. (2024) · Elsevier eBooks · doi:10.1016/b978-0-323-95730-4.00003-2 · Cited by 6
Tapered tip hollow silicon microneedles for transdermal drug delivery
Ashaf, M. W., Tayyaba, S., & Afzulpurkr, N. (2010) · International Conference on Mechanical and Electronics Engineering · doi:10.1109/icmee.2010.5558506 · Cited by 5
Material Science Chemistry of Electrochemical Microsensors and Applications for Biofilm Research
Lee, W. H., Choi, W. H., Guo, X. F., Heineman, W. R., & Bishop, P. L. (2012) · Key engineering materials · doi:10.4028/www.scientific.net/kem.521.113 · Cited by 5
Nanocomposite Thin Films with Hybrid Inorganic/Organic Matrix for the Modification of Silicon‐Based Implants
Nunes, J., Santos, R., Loureiro, V., & Piedade, A. P. (2012) · Plasma Processes and Polymers · doi:10.1002/ppap.201100089 · Cited by 5
Neuro-technical interfaces to the central nervous system
Stieglitz, T. (2006) · Poiesis & Praxis · doi:10.1007/s10202-006-0022-7 · Cited by 5
Prospects for a Robust Cortical Recording Interface
Shoffstall, A. J., & Capadona, J. R. (2018) · Elsevier eBooks · doi:10.1016/b978-0-12-805353-9.00028-0 · Cited by 5
A Magnetically Assembled High‐Aspect‐Ratio Needle Electrode for Recording Neuronal Activity
Yasui, T., Yamagiwa, S., Sawahata, H., Idogawa, S., Kubota, Y., Kita, Y., Yamashita, K., Numano, R., Koida, K., & Kawano, T. (2019) · Advanced Healthcare Materials · doi:10.1002/adhm.201801081 · Cited by 5
The Biocompatibility of Intracortical Microelectrode Recording Arrays for Brain Machine Interfacing
Skousen, J. L., & Tresco, P. A. (2017) · Series on bioengineering and biomedical engineering · doi:10.1142/9789813207158_0011 · Cited by 5
Precise Tubular Braid Structures of Ultrafine Microwires as Neural Probes: Significantly Reduced Chronic Immune Response and Greater Local Neural Survival in Rat Cortex
Kim, T., Zhong, Y., & Giszter, S. F. (2019) · IEEE Transactions on Neural Systems and Rehabilitation Engineering · doi:10.1109/tnsre.2019.2911912 · Cited by 5
Micro-coil probes for magnetic intracortical neural stimulation: Trade-offs in materials and design
Thyagarajan, K., Lujan, R. A., Wang, Q., Lu, J., Kor, S., Kakimoto, B., Chang, N., & Bert, J. A. (2021) · APL Materials · doi:10.1063/5.0023486 · Cited by 5
NeuroProbes - Development of Modular Multifunctional Probe Arrays for Neuroscience
Ruther, P., Kisban, S., Seidl, K., Spieth, S., Rubehn, B., Daub, M., Paul, O., Stieglitz, T., Zengerle, R., & Neves, H. P. (2007) · Cited by 5
A three-dimensional microassembly structure for micromachined planar microelectrode arrays
Ghovanloo, M., & Najafi, K. (2005) · International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology (MMB) · doi:10.1109/mmb.2005.1548398 · Cited by 5
Development of Titanium Needle Probes for Neural Recording and Evaluation of Magnetic Resonance Imaging Artifacts
Yoon, H., Deshpande, D. C., Kim, T. H., Jeong, E., Harbaugh, R. E., & Varadan, V. K. (2009) · Journal of Nanotechnology in Engineering and Medicine · doi:10.1115/1.4000039 · Cited by 5
Al thermomigration applied to the formation of deep junctions for power device insulation
Dilhac, J.-M., Cornibert, L., & Ganibal, C. (1999) · Microelectronics Reliability · doi:10.1016/s0026-2714(98)00158-9 · Cited by 5
Electrode structures for acquisition and neural stimulation controlling the cardiovascular system
Steltenkamp, S., Becher, K., Doerge, T., Ruff, R., & Hoffmann, K.-P. (2009) · Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC) · doi:10.1109/iembs.2009.5334568 · Cited by 5
Muscle surface recording and stimulation using integrated PDMS-based microelectrode arrays: Recording-triggered stimulation for prosthetic purposes
Guo, L., Kitashima, L. J., Villari, C. R., Klein, A. M., & DeWeerth, S. P. (2009) · IEEE Biomedical Circuits and Systems Conference (BioCAS) · doi:10.1109/biocas.2009.5372075 · Cited by 5
A low-cost, easy-fabricating stretchable microneedle-electrode array for intramuscular recording and stimulation
Guo, L., Guvanasen, G. S., Tuthill, C., Nichols, T. R., & DeWeerth, S. P. (2011) · International IEEE/EMBS Conference on Neural Engineering · doi:10.1109/ner.2011.5910610 · Cited by 5
Imaging local field potentials in the rat barrel cortex
Cecchetto, C., Schroder, S., Keil, S., Mahmud, M., Brose, E., Dogan, Ö., Bertotti, G., Wolansky, D., Tillack, B., Schneidewind, J., et al. (2015) · International Conference on Intelligent Informatics and Biomedical Sciences (ICIIBMS) · doi:10.1109/iciibms.2015.7439533 · Cited by 5
Neural prostheses and biomedical microsystems in neurological rehabilitation
Koch, K. P. (2007) · Springer eBooks · doi:10.1007/978-3-211-33079-1_56 · Cited by 5
INTRACELLULAR RECORDING WITH HIGH ASPECT RATIO MEMS NEURONAL PROBES
Hanein, Y., Lang, U., Theobold, J., Wyeth, R. C., Böhringer, K. F., & Daniel, T. L. (1994) · Cited by 5
Novel Compact Antennas for Biomedical Implants and Wireless Applications
Gosalia, K. C. (2005) · NCSU Libraries Repository (North Carolina State University Libraries) · Cited by 5
Implementation and testing of a biohybrid transition microelectrode array for neural recording and modulationPreprint
Ahmed, B., Binder, S., Boroomand, S., Strathman, H. J., Hantak, M. P., Shepherd, T., Ehrenhofer, A., Zhang, H., Shepherd, J. D., Solzbacher, F., et al. (2023) · bioRxiv (Cold Spring Harbor Laboratory) · doi:10.1101/2023.08.08.552362 · Cited by 5
A tassel-type multilayer flexible probe for invasive neural recording
Ye, Z.-P., Jing, Q., Ni, Y.-L., Wu, Z., Xiao, X., & Xiong, S. (2022) · Chip · doi:10.1016/j.chip.2022.100024 · Cited by 4
Simultaneous recording of neuronal discharge and calcium activity reveals claustrum-cortex neurosynchrony under anesthesia
Fan, P., Zhang, R., Xiao, G., Song, Y., Zhuang, C., Yuan, L., Mo, F., Lu, B., Xu, Z., Wang, Y., et al. (2024) · Fundamental Research · doi:10.1016/j.fmre.2023.12.012 · Cited by 4
Utah Neural Electrode Technology for Brain-Computer Interface
Xie, F., Xi, Y., Xu, Q., & Liu, J. (2020) · Acta Physico-Chimica Sinica · doi:10.3866/pku.whxb202003014 · Cited by 4
Double Electrode Experiments Reveal the Processes Occurring at PEDOT-Coated Neural Electrode Arrays
Zhang, Y., Chen, Y., Contera, S., & Compton, R. G. (2024) · ACS Applied Materials & Interfaces · doi:10.1021/acsami.4c05204 · Cited by 4
Fabrication of individually addressable microtip electrode array on a flexible substrate
Nam, Y.-H., Kim, J., Nam, K.-T., Kim, Y.-K., Lee, S.-K., & Park, J. (2025) · Sensors and Actuators A Physical · doi:10.1016/j.sna.2025.116412 · Cited by 4
The auditory nerve implant—concept and device description of a novel electrical auditory prosthesis
Lenarz, T., Solzbacher, F., Rieth, L. W., Leber, M., Adams, M. E., Salcher, R. B., Warren, D. J., Oxenham, A. J., Dyballa, K.-H., Samii, A., et al. (2025) · Bioelectronic Medicine · doi:10.1186/s42234-025-00188-3 · Cited by 4
Electrical interfaces for recording, stimulation, and sensing
Hess‐Dunning, A., & Zorman, C. A. (2015) · Elsevier eBooks · doi:10.1016/b978-0-323-26208-8.00002-9 · Cited by 4
Low-Power Communication for an Implanted Intracortical Visual Prosthesis
Omisakin, A., Mestrom, R., & Bentum, M. (2019) · TU/e Research Portal · Cited by 4
Analysis of Thin Film Parylene-Metal-Parylene Device Based on Mechanical Tensile Strength Measurement
Seok, S., Park, H., Choi, W., Kim, O., & Kim, J. (2019) · Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) · doi:10.1109/dtip.2019.8752695 · Cited by 4
Intracortical Electrodes
Wang, M., & Guo, L. (2020) · Springer eBooks · doi:10.1007/978-3-030-41854-0_4 · Cited by 4
Fork-shaped neural interface with multichannel high spatial selectivity in the peripheral nerve of a rat
Choi, W., Park, H., Oh, S., Hong, J.-H., Kim, J., Yoon, D. S., & Kim, J. (2024) · Journal of Neural Engineering · doi:10.1088/1741-2552/ad2d31 · Cited by 4
A Low-Energy Application Specific Instruction-Set Processor towards a Low-Computational Lossless Compression Method for Stimuli Position Data of Artificial Vision Systems
Sugiura, T., Imai, M., Yu, J., & Takeuchi, Y. (2017) · Journal of Information Processing · doi:10.2197/ipsjjip.25.210 · Cited by 4
Novel method of fabricating self-dissolvable and freely floating neural array
Leber, M., Bhandari, R., Solzbacher, F., & Negi, S. (2017) · International Conference on Solid-State Sensors, Actuators and Microsystems · doi:10.1109/transducers.2017.7994400 · Cited by 4
Surgical Training for the Implantation of Neocortical Microelectrode Arrays Using a Formaldehyde-fixed Human Cadaver Model
Mégevand, P., Woodtli, A., Yulzari, A., Cosgrove, G. R., Momjian, S., Stimec, B. V., Corniola, M. V., & Fasel, J. H. D. (2017) · Journal of Visualized Experiments · doi:10.3791/56584 · Cited by 4
Sensing Nerve Activity with Scalable and Robust Nerve Interfaces
Kuliasha, C. A., Spearman, B. S., Atkinson, E. W., Rustogi, P., Fumiturewalla, A. S., Nunamaker, E. A., Otto, K. J., Schmidt, C. E., & Judy, J. W. (2019) · Proceedings of IEEE Sensors/Proceedings of IEEE Sensors ... · doi:10.1109/sensors43011.2019.8956532 · Cited by 4
Biofabrication of a Low Modulus Bioelectroprobe for Neurons to Grow Into
Hao, Z., Wang, S., Zhang, K., Zhou, J., Li, D., He, J., Gao, L., & Wang, L. (2021) · Materials · doi:10.3390/ma14164718 · Cited by 4
Implantable Device Fabrication and Packaging
Stieglitz, T. (2021) · Handbook of Neuroengineering · doi:10.1007/978-981-15-2848-4_102-1 · Cited by 4
Development of the three dimensional multi-electrode array for neural recording
Chu, H.-Y., Kuo, T.-Y., Chang, B., Lu, S.-W., Chiao, C., & Fang, W. (2005) · International Conference on Solid-State Sensors, Actuators and Microsystems · doi:10.1109/sensor.2005.1497444 · Cited by 4
In-Cell Recording and Stimulation by Engulfment Mechanisms
Hai, A. (2014) · Springer eBooks · doi:10.1007/978-1-4899-8038-0_3 · Cited by 4

Authors: Campbell, P. K., Jones, K. E., Huber, R. J., Horch, K. W., & Normann, R. A.
Affiliations: University of Utah (US)
Venue: IEEE Transactions on Biomedical Engineering
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Published: 1991
Volume: 38
Issue: 8
Pages: 758-768
ISSN: 0018-9294 (ISSN-L)
DOI: 10.1109/10.83588
OpenAlex: W2111937020
Cited by: 881
References: 24
Citations by year: 2026: 21 · 2025: 29 · 2024: 41 · 2023: 24 · 2022: 35 · 2021: 32 · 2020: 40 · 2019: 39 · 2018: 34 · 2017: 41 · 2016: 36 · 2015: 41 · 2014: 43 · 2013: 56 · 2012: 41
FWCI: 1.70
Type: journal article
Language: en
Open access: closed
Licence: ieeexplore.ieee.org/Xplorehelp/downloads/license-information/IEEE.html (vor)
Locations: IEEE Transactions on Biomedical Engineering (publishedVersion)
PubMed (publishedVersion)
Topics: Life Sciences › Neuroscience › Cellular and Molecular Neuroscience › Neuroscience and Neural Engineering
Physical Sciences › Engineering › Electrical and Electronic Engineering › Analog and Mixed-Signal Circuit Design
Physical Sciences › Engineering › Electrical and Electronic Engineering › Advanced MEMS and NEMS Technologies
Keywords: neural interfaces, thermomigration, p+ silicon, micromachining, platinum coating, polyimide encapsulation, monocrystalline silicon substrate, galvanic isolation
MeSH terms: Animals, Biocompatible Materials, Cats, Electric Conductivity, Electric Stimulation, Electrodes, Implanted, Materials Testing, Microscopy, Electron, Scanning, Silicon, Somatosensory Cortex, Reproducibility of Results

About these checks

Registry, retraction, Cites and statistics results are computed, not judged, with one exception: a printed reference that no index lists is read once by a model before it counts as a citation error. Claims are extracted by a model and kept only when their quote appears verbatim in the text; each cited source is then checked, with a model’s help, for whether it says what the claim relies on. Those verdicts can be wrong — read the claim’s quote and the cited source before relying on one.

Statistics and arithmetic are recomputed, not judged.

Confidence bands are shown only for fields calibrated on our annotated test set. None is calibrated yet, so no band is shown.

What counts as a claim ›How we measure confidence ›How we check this ›

Are you an author, or do you see a problem with this page? Request a review

A silicon-based, three-dimensional neural interface: manufacturing processes for an intracortical electrode array

Abstract

Overview

Integrity signals

Verification

Claims the paper makes

Claims other papers make about this one

Citations

Cites

Cited by

Related

Metadata

Record

About these checks