Heterodyne picosecond thermoreflectance applied to nanoscale thermal metrology
Abstract
Picosecond thermoreflectance is an unprecedented powerful technique for nanoscale heat transfer analysis and metrology, but different sources of artifacts were reported in the literature making this technique difficult to use for long delay (several ns) thermal analysis. We present in this paper a new heterodyne picosecond thermoreflectance (HPTR) technique. As it uses two slightly frequency shifted lasers instead of a mechanical translation stage, it is possible to avoid all artifacts leading to erroneous thermal parameter identifications. The principle and set-up are described as well as the model. The signal delivered by the HPTR experiment is calculated for each excitation configurations, modulating or not the pump beam. We demonstrate the accuracy of the technique in the identification of the thermal conductivity of a 50 nm thick SiO2 layer. Then, we discuss the role of the modulation frequency for nanoscale heat transfer analysis.
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The detected signals in ASOPS-TDTR are not pure sinusoidal as those in conventional TDTR but are centered at the modulation frequency with sidebands of Δf in the frequency domain.
“The detected signals in ASOPS-TDTR are not pure sinusoidal as those in conventional TDTR but are centered at the modulation frequency with sidebands of Δ f in the frequency domain. 172”
From Tutorial: Time-domain thermoreflectance (TDTR) for thermal property characterization of bulk and thin film materials (2018) · cites this paper as [172]
HT-TDTR combines ASOPS with high-frequency modulation of the pump beam, enabling fast and accurate measurements of thermal properties.
“Dilhaire and co-workers 172, 173 proposed a high-throughput time-domain thermoreflectance (HT-TDTR) technique that combines ASOPS with high-frequency modulation of the pump beam, enabling fast and accurate measurements of thermal properties.”
From Tutorial: Time-domain thermoreflectance (TDTR) for thermal property characterization of bulk and thin film materials (2018) · cites this paper as [172]
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- Authors
- Dilhaire, S., Pernot, G., Calbris, G., Rampnoux, J. M., & Grauby, S.
- Affiliations
- Centre National de la Recherche Scientifique (FR)
- Venue
- Journal of Applied Physics
- Publisher
- AIP Publishing
- Published
- 2011-12-01
- Volume
- 110
- Issue
- 11
- Pages
- 114314 (1-13)
- ISSN
- 0021-8979 (ISSN-L)
- 1089-7550
- OpenAlex
- W2021535741
- Cited by
- 63
- References
- 33
- Citations by year
- 2025: 3 · 2024: 4 · 2023: 3 · 2022: 4 · 2021: 4 · 2020: 9 · 2019: 5 · 2018: 3 · 2017: 6 · 2016: 3 · 2015: 6 · 2014: 6 · 2013: 3 · 2012: 4
- FWCI
- 2.04
- Type
- journal article
- Language
- en
- Open access
- closed
- Locations
- Journal of Applied Physics (publishedVersion)
- HAL (submittedVersion)
- Oskar-Bordeaux (Universite de Bordeaux) (submittedVersion)
- Funders
- Agence Nationale de la Recherche (ANR-06-NANO-0020, ANR-06-NANO-0054, ANR-06-BLAN-0129)
- Topics
- Physical Sciences › Materials Science › Materials Chemistry › Thermal properties of materials
- Physical Sciences › Engineering › Mechanics of Materials › Thermography and Photoacoustic Techniques
- Physical Sciences › Engineering › Computational Mechanics › Laser Material Processing Techniques
- Keywords
- nanoscale heat transfer, thermal conductivity measurement, SiO2 thin films, modulation frequency, artifact avoidance
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