Cited by 63Thermal properties of materialsThermography and Photoacoustic TechniquesLaser Material Processing Techniques

Heterodyne picosecond thermoreflectance applied to nanoscale thermal metrology

Dilhaire, S., Pernot, G., Calbris, G., Rampnoux, J. M., Grauby, S.·2011·Journal of Applied Physics

Abstract

Picosecond thermoreflectance is an unprecedented powerful technique for nanoscale heat transfer analysis and metrology, but different sources of artifacts were reported in the literature making this technique difficult to use for long delay (several ns) thermal analysis. We present in this paper a new heterodyne picosecond thermoreflectance (HPTR) technique. As it uses two slightly frequency shifted lasers instead of a mechanical translation stage, it is possible to avoid all artifacts leading to erroneous thermal parameter identifications. The principle and set-up are described as well as the model. The signal delivered by the HPTR experiment is calculated for each excitation configurations, modulating or not the pump beam. We demonstrate the accuracy of the technique in the identification of the thermal conductivity of a 50 nm thick SiO2 layer. Then, we discuss the role of the modulation frequency for nanoscale heat transfer analysis.

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Crossref · 10.1063/1.3665129

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Authors
Dilhaire, S., Pernot, G., Calbris, G., Rampnoux, J. M., & Grauby, S.
Affiliations
Centre National de la Recherche Scientifique (FR)
Venue
Journal of Applied Physics
Published
2011-12-01
Volume
110
Issue
11
Pages
114314 (1-13)
ISSN
  • 0021-8979 (ISSN-L)
  • 1089-7550
OpenAlex
W2021535741
Cited by
63
References
33
Citations by year
2025: 3 · 2024: 4 · 2023: 3 · 2022: 4 · 2021: 4 · 2020: 9 · 2019: 5 · 2018: 3 · 2017: 6 · 2016: 3 · 2015: 6 · 2014: 6 · 2013: 3 · 2012: 4
FWCI
2.04
Type
journal article
Language
en
Open access
closed
Locations
  • Journal of Applied Physics (publishedVersion)
  • HAL (submittedVersion)
  • Oskar-Bordeaux (Universite de Bordeaux) (submittedVersion)
Funders
Agence Nationale de la Recherche (ANR-06-NANO-0020, ANR-06-NANO-0054, ANR-06-BLAN-0129)
Topics
  • Physical Sciences › Materials Science › Materials Chemistry › Thermal properties of materials
  • Physical Sciences › Engineering › Mechanics of Materials › Thermography and Photoacoustic Techniques
  • Physical Sciences › Engineering › Computational Mechanics › Laser Material Processing Techniques
Keywords
nanoscale heat transfer, thermal conductivity measurement, SiO2 thin films, modulation frequency, artifact avoidance

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