Thermal conductance of epitaxial interfaces
Abstract
The thermal conductance of interfaces between epitaxial TiN and single crystal oxides is measured at temperatures between 79.4 and 294 K using time-domain thermoreflectance. The analysis method relies on the ratio of the in-phase and out-of-phase signals of the lock-in amplifier for more accurate data analysis. The validity of this approach is tested by measurements on 6.5, 11.8, and 25 nm thick thermally oxidized ${\mathrm{SiO}}_{2}$ on Si. The thermal conductances G of TiN/MgO(001), TiN/MgO(111), and ${\mathrm{T}\mathrm{i}\mathrm{N}/\mathrm{A}\mathrm{l}}_{2}{\mathrm{O}}_{3}(0001)$ interfaces are essentially identical and in good agreement with the predictions of lattice dynamics models and the diffuse mismatch model with a four-atom fcc unit cell. Near room temperature, $G\ensuremath{\approx}700{\phantom{\rule{0ex}{0ex}}\mathrm{M}\mathrm{W}\mathrm{m}}^{\ensuremath{-}2}\phantom{\rule{0ex}{0ex}}{\mathrm{K}}^{\ensuremath{-}1},$ $\ensuremath{\approx}5$ times larger than the highest values reported previously for any individual interface.
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TDTR has been frequently used to measure the heat capacity of new materials and the thermal conductance of various solid/solid interfaces.
“The heat capacity of new materials 38, 39 and thermal conductance of various solid/solid interfaces 40-47 have also been frequently measured using TDTR.”
From Tutorial: Time-domain thermoreflectance (TDTR) for thermal property characterization of bulk and thin film materials (2018) · cites this paper as [46]
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- Authors
- Costescu, R. M., Wall, M. A., & Cahill, D. G.
- Affiliations
- University of Illinois Urbana-Champaign (US)
- Venue
- Physical Review B
- Publisher
- American Physical Society (APS)
- Published
- 2003-02-27
- Volume
- 67
- Issue
- 5
- ISSN
- 0163-1829 (ISSN-L)
- 1095-3795
- OpenAlex
- W2056831945
- Cited by
- 486
- References
- 26
- Citations by year
- 2026: 12 · 2025: 17 · 2024: 21 · 2023: 13 · 2022: 23 · 2021: 25 · 2020: 32 · 2019: 31 · 2018: 31 · 2017: 36 · 2016: 35 · 2015: 24 · 2014: 27 · 2013: 21 · 2012: 22
- FWCI
- 8.06
- Type
- journal article
- Language
- en
- Open access
- closed
- Locations
- Physical review. B, Condensed matter (publishedVersion)
- Topics
- Physical Sciences › Materials Science › Materials Chemistry › Thermal properties of materials
- Physical Sciences › Engineering › Mechanics of Materials › Thermography and Photoacoustic Techniques
- Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Semiconductor materials and interfaces
- Keywords
- thermal conductance, epitaxial interface, tin, MgO, alumina, time-domain thermoreflectance, diffuse mismatch model, lattice dynamics, interfacial heat transfer
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