Sputtered iridium oxide films (SIROFs) for low-impedance neural stimulation and recording electrodes
Open accessAbstract
Iridium oxide films formed by electrochemical activation of iridium metal (AIROF) or by electrochemical deposition (EIROF) are being evaluated as low-impedance charge-injection coatings for neural stimulation and recording. Iridium oxide may also be deposited by reactive sputtering from iridium metal in an oxidizing plasma. The characterization of sputtered iridium oxide films (SIROFs) as coatings for nerve electrodes is reported. SIROFs were characterized by cyclic voltammetry, electrochemical impedance spectroscopy, and potential transient measurements during charge-injection. The surface morphology of the SIROF transitions from smooth to highly nodular with increasing film thickness from 80 nm to 4600 nm. Charge-injection capacities exceed 0.75 mC/cm(2) with 0.75 ms current pulses in thicker films. The SIROF was deposited on both planar and non-planar substrates and photolithographically patterned by lift-off.
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Sputtered iridium oxide films are mechanically stable and can resist corrosion and degradation.
“In contrast, sputtered iridium oxide films have been shown to be mechanically stable and can resist corrosion and degradation [11].”
From Flexible Nerve Stimulation Electrode With Iridium Oxide Sputtered on Liquid Crystal Polymer (2009) · cites this paper as [11]
Sputtered iridium oxide films can adhere to various substrates.
“Sputtered iridium oxide films have superior charge injection capabilities versus noble metals and can adhere to various substrates.”
From Flexible Nerve Stimulation Electrode With Iridium Oxide Sputtered on Liquid Crystal Polymer (2009) · cites this paper as [11]
Sputtered iridium oxide films have been deposited onto platinum and silicon substrates.
“Sputtered iridium oxide films have been deposited onto platinum [11] and silicon [16] substrates.”
From Flexible Nerve Stimulation Electrode With Iridium Oxide Sputtered on Liquid Crystal Polymer (2009) · cites this paper as [11]
The reduction of oxygen is known to produce superoxides, peroxides, and peroxide ions that can initiate free radical reactions and result in tissue damage.
“The reduction of oxygen is known to produce superoxides, peroxides, and peroxide ions that can initiate free radical reactions and result in tissue damage [10] [11].”
From Flexible Nerve Stimulation Electrode With Iridium Oxide Sputtered on Liquid Crystal Polymer (2009) · cites this paper as [11]
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- Authors
- Cogan, S. F., Plante, T. D., & Ehrlich, J.
- Affiliations
- EIC Laboratories (US)
- ORCID
- Cogan, S.F.
- Venue
- The 26th Annual International Conference of the IEEE Engineering in Medicine and Biology Society
- Publisher
- IEEE
- Published
- 2005-04-06
- Volume
- 4
- Pages
- 4153-4156
- ISSN
- 2375-7477 (ISSN-L)
- PMC
- PMC2709748
- OpenAlex
- W111354489
- Cited by
- 138
- References
- 7
- Citations by year
- 2026: 3 · 2025: 7 · 2024: 7 · 2023: 4 · 2022: 5 · 2021: 10 · 2020: 10 · 2019: 9 · 2018: 9 · 2017: 8 · 2016: 10 · 2015: 5 · 2014: 6 · 2013: 8 · 2012: 3
- FWCI
- 17.43
- Type
- conference paper
- Language
- en
- Open access
- green
- www.ncbi.nlm.nih.gov
- Locations
- Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC) (publishedVersion)
- PubMed (publishedVersion)
- PubMed Central (acceptedVersion)
- Funders
- National Heart, Lung, and Blood Institute (R44HL071395)
- Topics
- Life Sciences › Neuroscience › Cellular and Molecular Neuroscience › Neuroscience and Neural Engineering
- Physical Sciences › Materials Science › Polymers and Plastics › Conducting polymers and applications
- Physical Sciences › Chemistry › Electrochemistry › Electrochemical Analysis and Applications
- Keywords
- iridium oxide films, reactive sputtering, neural stimulation electrodes, neural recording electrodes, electrode impedance, electrochemical activation, electrodeposition, film thickness effects, surface morphology, lift-off patterning, photolithography
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