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Ultrafast laser processing of materials: from science to industry

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Malinauskas, Mangirdas, Žukauskas, Albertas, Hasegawa, Satoshi, Hayasaki, Yoshio, Mizeikis, Vygantas, Buividas, Ričardas, Juodkazis, Saulius·2016·Light: Science & Applications
DOI 10.1038/lsa.2016.133
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Abstract

Processing of materials by ultrashort laser pulses has evolved significantly over the last decade and is starting to reveal its scientific, technological and industrial potential. In ultrafast laser manufacturing, optical energy of tightly focused femtosecond or picosecond laser pulses can be delivered to precisely defined positions in the bulk of materials via two-/multi-photon excitation on a timescale much faster than thermal energy exchange between photoexcited electrons and lattice ions. Control of photo-ionization and thermal processes with the highest precision, inducing local photomodification in sub-100-nm-sized regions has been achieved. State-of-the-art ultrashort laser processing techniques exploit high 0.1–1 μm spatial resolution and almost unrestricted three-dimensional structuring capability. Adjustable pulse duration, spatiotemporal chirp, phase front tilt and polarization allow control of photomodification via uniquely wide parameter space. Mature opto-electrical/mechanical technologies have enabled laser processing speeds approaching meters-per-second, leading to a fast lab-to-fab transfer. The key aspects and latest achievements are reviewed with an emphasis on the fundamental relation between spatial resolution and total fabrication throughput. Emerging biomedical applications implementing micrometer feature precision over centimeter-scale scaffolds and photonic wire bonding in telecommunications are highlighted.

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Cited by

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Metadata

Authors
Malinauskas, M., Žukauskas, A., Hasegawa, S., Hayasaki, Y., Mizeikis, V., Buividas, R., & Juodkazis, S.
Venue
Light: Science & Applications
Publisher
Springer Science and Business Media LLC
Published
2016-03-14
Volume
5
Issue
8
Pages
e16133-e16133
ISSN
2047-7538 (ISSN-L)
DOI
10.1038/lsa.2016.133
OpenAlex
W2514605621
Cited by
1,364
References
9
FWCI
97.58
Type
journal article
Language
en
Open access
gold
Licence

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CoChat. (2026). Citation check: Ultrafast laser processing of materials: from science to industry. https://app.cochat.ai/papers/10.1038/lsa.2016.133
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Malinauskas, M., Žukauskas, A., Hasegawa, S., Hayasaki, Y., Mizeikis, V., Buividas, R., & Juodkazis, S. (2016). Ultrafast laser processing of materials: from science to industry. Light: Science & Applications. https://doi.org/10.1038/lsa.2016.133

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